Dennis Price

Megasonic enhanced electrodeposition

A novel way of filling high aspect ratio vertical interconnection (microvias) is presented. High frequency acoustic streaming at megasonic frequencies enables the decrease of the Nernst-diffusion layer down to the sub-micron range, allowing thereby conformal electrodeposition in deep grooves. Higher throughput and better control over the deposition properties are therefore possible for the manufacturing of interconnections and metal-based MEMS.

Morphology and acoustic artefacts of copper deposits electroplated using megasonic assisted agitation

Purpose This study aims to understand the influence of megasonic (MS)-assisted agitation on printed circuit boards (PCBs) electroplated using copper (Cu) electrolyte solutions to improve plating efficiencies through enhanced ion transportation. Design/methodology/approach The impact of MS-assisted agitation on topographical properties of the electroplated surfaces was studied through a design of experiments by measuring surface roughness, which is characterised by values of the parameter Ra as measured by white light phase shifting interferometry and high-resolution scanning electron microscopy. Findings An increase in Ra from 400 to 760 nm after plating was recorded for an increase in acoustic power from 45 to 450 W. Roughening increased because of micro-bubble cavitation energy and was supported through direct imaging of the cavitation. Current thieving effect by the MS transducer induced low currents, leading to large Cu grain frosting and reduction in the board quality. Current thieving was negated in plating trials through specific placement of transducer. Wavy electroplated surfaces, due to surface acoustic waves, were also observed to reduce the uniformity of the deposit. Research limitations/implications The formation of unstable transient cavitation and variation of the topology of the Cu surface are unwanted phenomena. Further plating studies using MS agitation are needed, along with fundamental simulations, to determine how the effects can be reduced or prevented. Practical implications This study can help identify manufacturing settings required for high-quality MS-assisted plating and promote areas for further investigation, leading to the development of an MS plating manufacturing technique. Originality/value This study quantifies the topographical changes to a PCB surface in response to MS agitation and evidence for deposited Cu artefacts due to acoustic effects.

Advanced electrical array interconnections for ultrasound probes integrated in surgical needles

Real-time ultrasound guidance during neurosurgery is a novel and sought-after technique that enables imaging data to be acquired with improved precision during surgical intervention. Surgical needles that are inserted in the tissue of interest can be guided using the real-time graphical information collected by an embedded ultrasound transducer. The miniaturisation capabilities of modern manufacturing technologies allow the fabrication of ultrasound probes that are small enough to be fitted in needles conventionally used in surgical practices (down to ~2 mm inner diameter). High lateral resolution may in fact be achieved by producing miniaturised ultrasound transducer arrays with a series of emitting/receiving elements, each electrically isolated from the others. To guarantee the functionality of such devices, a series of independent electrical interconnections must be implemented that enables the external driving electronics of the imaging system to be connected to the miniaturised ultrasound probe array. This paper presents a novel interconnection scheme designed to interface ultrasound probes integrated in surgical needles with the driving electronics. The presented solution utilises a flexible printed circuit board carrying the electrical tracks and a bonding technique with an anisotropic conductive paste.

Influence of megasonic agitation on the electrodeposition of high aspect ratio blind vias

This paper presents preliminary studies in electroplating using megasonic agitation to avoid the formation of voids within high aspect ratio microvias that are used for the redistribution of interconnects in high density interconnection technology in printed circuit boards. Through this technique, uniform deposition of metal on the side walls of the vias is possible. High frequency acoustic streaming at megasonic frequencies enables the decrease of the Nernst diffusion layer down to the sub-micron range, allowing thereby conformal electrodeposition in deep grooves. This effect enables the normally convection free liquid near the surface to be agitated. Higher throughput and better control of the material properties of the deposits can be achieved for the manufacturing of embedded interconnections and metal-based MEMS. For optimal filling performance of the microvias, a full design of experiments (DOE) and a multi-physics numerical simulation have been conducted to analyse the influence of megasonic agitation on the plating quality of the microvias. Megasonic based deposition has been found to increase the deposition rate as well as improving the quality of the metal deposits.

Copper electroplating of PCB interconnects using megasonic acoustic streaming

In this research experimental and simulated analysis investigates the influence of megasonic (MS; 1 ± 0.05 MHz) acoustic-assisted electroplating techniques, with respect to the fabrication of through-hole via (THV) and blind-via (BV) interconnects for the Printed Circuit Board (PCB) industry. MS plating of copper down THV and BV interconnects was shown to produce measurable benefits such as increased connectivity throughout a PCB and cost savings. More specifically, a 700% increase of copper plating rate was demonstrated for THVs of 175 µm diameter and depth-to-width aspect ratio (ar) of 5.7:1, compared with electrodeposition under no-agitation conditions. For BVs, a 60% average increase in copper thickness deposition in 150 µm and 200 µm, ar 1:1, was demonstrated against plating under standard manufacturing conditions including bubble agitation and panel movement. Finite element modelling simulations of acoustic scattering revealed 1st harmonic influence for plating rate enhancement.

A compact packaging technique for the integration of ultrasound probes in surgical needles

State-of-the-art neurosurgery intervention relies heavily on tissue imaging information taken at a pre-operative stage. The data retrieved prior to performing an opening in the patients skull, however, may present inconsistencies with respect to the tissue position observed by the surgeon during intervention, due to both the pulsing activity of the brain and possible displacements caused by movement of the patient and the pressure difference between the external and internal environment. The consequent uncertainty during the insertion of surgical tools into the treated tissue gives rise to great interest in real-time guidance techniques. In that respect, ultrasound imaging during neurosurgery is a promising method for imaging the tissue while inserting surgical tools, as it provides high lateral resolution images. While microelectromechanical systems (MEMS) manufacturing techniques have enabled the miniaturisation of ultrasound array devices to fit needle gauges down to 2 mm inner diameter, the challenge in scaling the probes for their integration in surgical needles lies in the development of adequate interconnection techniques to interface the microscale transducer at the tip of the needle with the macroscale driving electronic circuitry. This paper presents progress towards a novel packaging scheme that involves a thin flexible printed circuit interconnection wound inside a surgical needle and connected to the probe at the tip by means of a magnetically aligned anisotropic conductive paste. This bonding technology offers higher compactness compared to conventional wire bonding, as the individual electrical connections are isolated from one another within the volume of the paste line.