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Dieter Bader

Carl Zeiss AG

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Publication

Featured researches published by Dieter Bader.

Archive | 2008

OPTICAL SYSTEM WITH AT LEAST A SEMICONDUCTOR LIGHT SOURCE AND A METHOD FOR REMOVING CONTAMINATIONS AND/OR HEATING THE SYSTEMS

Dieter Bader

Archive | 2005

Projection objective, projection exposure apparatus and reflective reticle for microlithography

Aurelian Dodoc; Wilhelm Ulrich; Dieter Bader; Alexander Epple

Archive | 2004

Optical apparatus for illuminating an object

Dieter Bader; Norbert Reng; Johannes Wangler

Archive | 2003

Optical device comprising an light source

Dieter Bader; Norbert Reng; Johannes Wangler

Archive | 2005

Illumination sytsem for a microlithographic projection exposure apparatus

Wolfgang Singer; Dieter Bader; Johannes Wangler; Markus Degünther

Archive | 2011

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Dieter Bader

Archive | 2010

Illuminating device for microlithography projection illumination system that manufactures micro-structured component, has lens aperture with surface bulged in light propagation direction, where aperture masks base light distribution areas

Dieter Bader; Anton Cersowsky; Ralf Scharnweber; Wolfgang Singer

Archive | 2006

Refractive optical imaging system, in particular projection objective for microlithography

Wilhelm Ulrich; David Shafer; Dieter Bader; Alexander Epple

Archive | 2006

Collector for lighting systems with a wavelength = 193 nm

Joachim Hainz; Martin Endres; Wolfgang Singer; Bernd Kleemann; Dieter Bader

Archive | 2003

Method for producing an optical element from a quartz substrate

Nils Dieckmann; Kirstin Becker; Dieter Bader

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Collaboration

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Wolfgang Singer

Carl Zeiss AG

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Alexander Epple

Carl Zeiss AG

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Johannes Wangler

Carl Zeiss AG

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Wilhelm Ulrich

Carl Zeiss AG

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Aurelian Dodoc

Carl Zeiss AG

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Bernd Kleemann

Carl Zeiss AG

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Joachim Hainz

Carl Zeiss AG

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Martin Endres

Carl Zeiss AG

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Anton Cersowsky

Carl Zeiss AG

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Kirstin Becker

Carl Zeiss AG

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