Joachim Hainz

EUV collectors: design, development, fabrication, and testing

EUV sources are designed to emit radiation around 13.5 nm wavelength into a solid angle of up to 2π sr. With a suitable Wolter type 1 grazing incidence optic such EUV photons can be collected with high efficiency and focussed onto a preferred target. Such Wolter type 1 collectors are characterized by densely nested concentric and confocal mirror shells with fixed distance from the source and the intermediate image. In this paper we will report on optical and mechanical design, development, fabrication and testing of nested Wolter type 1 collectors, capable of collecting and imaging EUV photons at 13.5 nm wavelength with high efficiency.