Do-Hyun Kong

Design and fabrication of scanning mirror for laser display

A 1500mm � 1200 mm silicon scanning mirror for laser display has been designed and fabricated by deep inductively coupled plasma reactive ion etching (ICPRIE) and flip chip bonding technology. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. The upper structure is composed of a scanning mirror plate, two torsion bars, a supporting frame and vertical comb fingers. The lower structure is composed of vertical comb fingers, a supporting frame, gold signal lines and pads on the Pyrex glass substrate. The comb fingers are etched by ICPRIE and assembled by flip chip aligner bonder. This scanning mirror can be used for laser display as a galvanometric vertical scanner. # 2002 Elsevier Science B.V. All rights reserved.

Fabrication of silicon optical scanner for laser display

A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner.

Laser TV for home theater

The laser TV using blue, green diode-pumped solid state lasers and a red diode laser is developed. The wavelengths of the blue, green and red are 457 nm, 532 nm and 648 nm, and the output powers are 350 mW, 700 mW and 500 mW, respectively. The power levels of lasers are adjusted for white color balance. The polygon mirror and the galvanometer are used for horizontal scanning and vertical scanning, respectively. The image size of 80 inches with high-brightness and VGA resolution (640 X 480 Progressive scanning) is obtained. The acousto-optic modulator (AOM) is fabricated for laser beam modulation, for which the carrier frequency of 350 MHz for XGA resolution is applied. TeO2 crystal, which is cut at Brewster angle, is used as an optical medium and LiNbO3 is attached as a transducer. In order to get a compact size, low cost, low-power consumption and lightweight, a scanning mirror using MEMS technology is fabricated by the size of 1500 micrometers X 1200 micrometers . This scanning mirror can be used as a galvanometric vertical scanner for laser TV.