Dong Su Park
SK Hynix
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Publication
Featured researches published by Dong Su Park.
european solid-state device research conference | 2006
Ho Jin Cho; Young-dae Kim; Dong Su Park; Euna Lee; Cheol Hwan Park; Jun Soo Jang; Keum Bum Lee; Hai Won Kim; Soo Jin Chae; Young Jong Ki; Il Keun Han; Yong Wook Song
New ZrO2/Al2O3/ZrO2 (ZAZ) dielectric film was successfully developed for DRAM capacitor dielectrics of 60nm and below technologies. ZAZ dielectric film grown by ALD has a mixture structure of crystalline phase ZrO2 and amorphous phase Al2O3 in order to optimize dielectric properties. ZAZ TIT capacitor showed small Tox.eq of 8.5 Aring and low leakage current density of 0.35fA/cell, which meet leakage current criteria of 0.5fA/cell for mass production. ZAZ TIT capacitor showed smaller cap leak fail bit than HAH capacitor and stable leakage current up to 550degC anneal. TDDB (time dependent dielectric breakdown) behavior reliably satisfied the 10-year lifetime criteria within operation voltage range
Archive | 2004
Tae Hyeok Lee; Cheol Hwan Park; Dong Su Park; Ho Jin Cho; Eun A. Lee
Archive | 2003
Cheol Hwan Park; Dong Su Park; Tae Hyeok Lee; Sang Ho Woo
Solid-state Electronics | 2007
Ho Jin Cho; Young-dae Kim; Dong Su Park; Euna Lee; Cheol Hwan Park; Jun Soo Jang; Keum Bum Lee; Hai Won Kim; Young Jong Ki; Il Keun Han; Yong Wook Song
Archive | 2007
Dong Su Park; Ho Jin Cho; Keum Bum Lee; Su Jin Chae; Cheol Hwan Park
Archive | 2000
Seung Hun Jung; Hyeong Gyun Kim; Cheol Hwan Park; Dong Su Park; Sang Ho Woo
Archive | 2003
Seung Hun Jung; Hyeong Gyun Kim; Dong Su Park; Sang Ho Woo
Archive | 2007
Keum Bum Lee; Dong Su Park; Jun Soo Chang; Eun A. Lee
Archive | 2006
Cheol Hwan Park; Dong Su Park; Eun A. Lee; Hye Jin Seo
Solid-state Electronics | 2006
Ho Jin Cho; Young-dae Kim; Dong Su Park; Euna Lee; Cheol Hwan; Soo Jang; Keum Bum Lee; Hai Won Kim; Soo Jin Chae; Young Jong Ki; Keun Han; Yong Wook Song
