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Dive into the research topics where Dongjiang Wang is active.

Publication


Featured researches published by Dongjiang Wang.


ECS Transactions | 2013

CD Bias Loading Control in Metal Hard Mask Open Process

Dongjiang Wang; Minda Hu; Jun-Qing Zhou; Cheng-Long Zhang; Xinpeng Wang; Hai-Yang Zhang


ECS Transactions | 2014

The Optimization of Metal Hard-Mask Based All-in-One Etch

Cheng-Long Zhang; Minda Hu; Jun-Qing Zhou; Dongjiang Wang; Qi-Yang He; Hai-Yang Zhang


ECS Transactions | 2013

All-In-One Etch Scheme to the Fabrication of Metal Hard-Mask Based Cu/Ultra Low-K Interconnects

Minda Hu; Jun-Qing Zhou; Dongjiang Wang; Cheng-Long Zhang; Jack Huang; Xinpeng Wang; Hai-Yang Zhang; Zhou Mo; Toshihiko Shindo; Li-Hung Chen


ECS Transactions | 2013

Applying Uniform Design of Experiment in Tri-Layer-Based Trench Etch for EM Lifetime Performance Enhancement

Jun-Qing Zhou; Siyuan Frank Yang; Xinpeng Wang; Minda Hu; Dongjiang Wang; Cheng-Long Zhang; Yi-Bin Cao; Zheng-Hao Gan; Hai-Yang Zhang


china semiconductor technology international conference | 2012

The Effect of Via Patterning Scheme and Metal Hard-Mask Based All-In-One Etch on Contact Resistance of Cu/low-k Interconnects

Min-Da Hu; Junqing Zhou; Dongjiang Wang; Cheng-Long Zhang; Xinpeng Wang; Haiyang Zhang; Zhou Mo; Toshihiko Shindo; Li-Hung Chen


ECS Transactions | 2014

The Critical Role of the Plasma-Based Post Litho Treatment

Qiuhua Han; Xiao-Ying Meng; Jing-Yong Huang; Xiao-jun Jiang; Qi-Yang He; Dongjiang Wang; Rui-Xuan Huang; Minda Hu; Hai-Yang Zhang


Archive | 2011

Post-etch treating method

Haiyang Zhang; Minda Hu; Junqing Zhou; Dongjiang Wang


ECS Transactions | 2014

Advanced STI Etch Process Development on NMC Etcher

Dongjiang Wang; Yi-Ying Zhang; Qiuhua Han; Qi-Yang He; Ya Li Fu; Meng Yang; Hai-Yang Zhang


ECS Transactions | 2013

Fabrication of TiN Blade Bottom Electrical Contact for PC-RAM

Dongjiang Wang; Jun-Qing Zhou; Yali Fu; Minda Hu; Cheng-Long Zhang; Xinpeng Wang; Hai-Yang Zhang


ECS Transactions | 2013

Formation of Porous Low-K Dielectric Interconnect Structure on Advanced Dielectric-Reactive Ion Etcher

Cheng-Long Zhang; Minda Hu; Jun-Qing Zhou; Dongjiang Wang; Xinpeng Wang; Kwok-Fung Lee; Hai-Yang Zhang

Collaboration


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Cheng-Long Zhang

Semiconductor Manufacturing International Corporation

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Haiyang Zhang

Semiconductor Manufacturing International Corporation

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Junqing Zhou

Semiconductor Manufacturing International Corporation

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Min-Da Hu

Semiconductor Manufacturing International Corporation

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Xing-Hua Song

Semiconductor Manufacturing International Corporation

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