Dongliang Yin

Integrated ARROW waveguides with hollow cores.

We report the design, fabrication, and demonstration of antiresonant reflecting optical (ARROW) waveguides with hollow cores. We describe the design principles to achieve low waveguide loss in both transverse and lateral directions. A novel fabrication process using silicon dioxide and silicon nitride layers as well as sacrificial polyimide core layers was developed. Optical characterization of 3.5mum thick waveguides with air cores was carried out. We demonstrate single-mode propagation through these hollow ARROW waveguides with propagation loss as low as 6.5cm-1 and mode cross sections down to 6.7mum2. Applications of these waveguides to sensing and quantum communication are discussed.

Integrated optical waveguides with liquid cores

We report the design, fabrication, and demonstration of single-mode integrated optical waveguides with liquid cores. The principle of the device is based on antiresonant reflecting optical (ARROW) waveguides with hollow cores. We describe design principles for waveguide loss optimization down to 0.1∕cm. Using a fabrication process based on conventional silicon microfabrication and sacrificial core layers, waveguides of varying widths and lengths with volumes covering the pico- to nanoliter range were fabricated. We observe confined mode propagation, measure waveguide losses of 2.4∕cm, and demonstrate that the waveguides possess tailorable wavelength selectivity. The potential for highly integrated, sensitive devices based on these properties of the ARROW waveguides is discussed.

Single-molecule detection sensitivity using planar integrated optics on a chip

We present a fully planar integrated optical approach to single-molecule detection based on microfabricated planar networks of intersecting solid and liquid-core waveguides. We study fluorescence from dye molecules in liquid-core antiresonant reflecting optical waveguides, and demonstrate subpicoliter excitation volumes, parallel excitation through multiple pump waveguides, and single-molecule detection sensitivity. Integrated silicon photonics combined with single-molecule detection in solution create a compact, robust, and sensitive platform that has applications in numerous fields ranging from atomic physics to the life sciences.

Planar optofluidic chip for single particle detection, manipulation, and analysis.

We present a fully planar integrated optofluidic platform that permits single particle detection, manipulation and analysis on a chip. Liquid-core optical waveguides guide both light and fluids in the same volume. They are integrated with fluidic reservoirs and solid-core optical waveguides to define sub-picoliter excitation volumes and collect the optical signal, resulting in fully planar beam geometries. Single fluorescently labeled liposomes are used to demonstrate the capabilities of the optofluidic chip. Liposome motion is controlled electrically, and fluorescence correlation spectroscopy (FCS) is used to determine concentration and dynamic properties such as diffusion coefficient and velocity. This demonstration of fully planar particle analysis on a semiconductor chip may lead to a new class of planar optofluidics-based instruments.

On-chip surface-enhanced Raman scattering detection using integrated liquid-core waveguides

The authors demonstrate surface-enhanced Raman scattering (SERS) detection on an optofluidic chip. Interconnected solid- and liquid-core antiresonant reflecting optical waveguides (ARROWs) form a planar beam geometry that allows for high mode intensities along microfluidic channels containing molecules optimized for SERS. The excitation power and concentration dependence of SERS from rhodamine 6G (R6G) molecules adsorbed to silver nanoparticles were systematically studied. The data can be described by a model that takes into account the microphotonic structure. Detection sensitivity to a minimum concentration of 30nM is found, demonstrating the suitability of ARROW-based optofluidic chips for high sensitivity detection with molecular specificity.

Integrated hollow waveguides with arch-shaped cores

An optical waveguide is described that has a hollow arch-shaped core. Optical confinement for this structure is based on the antiresonant reflecting optical waveguide principle. The waveguides are built on a silicon substrate using a sacrificial etch technique with reflowed photoresist serving as the sacrificial material and producing the cores arch shape. Investigations of fabrication parameters are reported that allow for predicting a final arch-shaped geometry based on initial photoresist width and thickness. Optical mode guiding is demonstrated in an arch-shaped waveguide with a liquid core.

Waveguide loss optimization in hollow-core ARROW waveguides

We discuss optimization of the optical properties of hollow-core antiresonant reflecting optical waveguides (ARROWs). We demonstrate significant reduction of waveguide loss to 2.6/cm for a 10.4microm(2) mode area after adding an initial etching step of the substrate material. The effect of differences in confinement layer thickness is quantified and an optimized design is presented. The polarization dependence of the waveguide loss is measured and the implications for applications are discussed.

Fabrication of hollow waveguides with sacrificial aluminum cores

We have developed a process to fabricate dielectric waveguide structures with long hollow cores formed by etching a sacrificial core material. The process is compatible with other planar silicon fabrication techniques. Using aluminum as the sacrificial material, we have investigated fabrication limits and design parameters that determine mechanical integrity of the waveguides. Internal pressure due to the production of gaseous compounds during the core removal process was identified as the yield-limiting factor. A mechanical model based on finite element analysis and confirmed by experiment, predicts ultimate pressures sustainable by these structures. Waveguides less than 10 /spl mu/m wide with 2-/spl mu/m-thick coatings should sustain 50 MPa of internal pressure. Low-loss guided-mode propagation in optical waveguides based on these hollow cores is demonstrated.

Optical characterization of arch-shaped ARROW waveguides with liquid cores.

We present the characterization of the optical properties of integrated antiresonant reflecting optical (ARROW) waveguides with arch-shaped liquid cores. Optical mode shapes and coupling, waveguide loss, and polarization dependence are investigated. Waveguide loss as low as 0.26/cm with near-single-mode coupling and mode areas as small as 4.5microm2 are demonstrated. A detailed comparison to ARROW waveguides with rectangular cores is presented, and shows that arch-shaped cores are superior for many applications.

Microphotonic control of single molecule fluorescence correlation spectroscopy using planar optofluidics.

We demonstrate the implementation of fluorescence correlation spectroscopy (FCS) on a chip. Full planar integration is achieved by lithographic definition of sub-picoliter excitation volumes using intersecting solid and liquid-core optical waveguides. Concentration dependent measurements on dye molecules with single molecule resolution are demonstrated. Theoretical modeling of the FCS autocorrelation function in microstructured geometries shows that the FCS behavior can be controlled over a wide range by tailoring the micro-photonic environment. The ability to perform correlation spectroscopy using silicon photonics without the need for free-space microscopy permits implementation of numerous diagnostic applications on compact planar optofluidic devices.