Philip Measor

On-chip surface-enhanced Raman scattering detection using integrated liquid-core waveguides

The authors demonstrate surface-enhanced Raman scattering (SERS) detection on an optofluidic chip. Interconnected solid- and liquid-core antiresonant reflecting optical waveguides (ARROWs) form a planar beam geometry that allows for high mode intensities along microfluidic channels containing molecules optimized for SERS. The excitation power and concentration dependence of SERS from rhodamine 6G (R6G) molecules adsorbed to silver nanoparticles were systematically studied. The data can be described by a model that takes into account the microphotonic structure. Detection sensitivity to a minimum concentration of 30nM is found, demonstrating the suitability of ARROW-based optofluidic chips for high sensitivity detection with molecular specificity.

Loss-based optical trap for on-chip particle analysis.

Optical traps have become widespread tools for studying biological objects on the micro and nanoscale. However, conventional laser tweezers and traps rely on bulk optics and are not compatible with current trends in optofluidic miniaturization. Here, we report a new type of particle trap that relies on propagation loss in confined modes in liquid-core optical waveguides to trap particles. Using silica beads and E. coli bacteria, we demonstrate unique key capabilities of this trap. These include single particle trapping with micron-scale accuracy at arbitrary positions over waveguide lengths of several millimeters, definition of multiple independent particle traps in a single waveguide, and combination of optical trapping with single particle fluorescence analysis. The exclusive use of a two-dimensional network of planar waveguides strongly reduces experimental complexity and defines a new paradigm for on-chip particle control and analysis.

Hollow-core waveguide characterization by optically induced particle transport

We introduce a method for optical characterization of hollow-core optical waveguides. Radiation pressure exerted by the waveguide modes on dielectric microspheres is used to analyze salient properties such as propagation loss and waveguide mode profiles. These quantities were measured for quasi-single-mode and multimode propagation in on-chip liquid-filled hollow-core antiresonant reflecting optical waveguides. Excellent agreement with analytical and numerical models is found, demonstrating that optically induced particle transport provides a simple, inexpensive, and nondestructive alternative to other characterization methods.

Tailorable integrated optofluidic filters for biomolecular detection

Spectral filtering is an essential component of biophotonic methods such as fluorescence and Raman spectroscopy. Predominantly utilized in bulk microscopy, filters require efficient and selective transmission or removal of signals at one or more wavelength bands. However, towards highly sensitive and fully self-contained lab-on-chip systems, the integration of spectral filters is an essential step. In this work, a novel optofluidic solution is presented in which a liquid-core optical waveguide both transports sample analytes and acts as an efficient filter for advanced spectroscopy. To this end, the wavelength dependent nature of interference-based antiresonant reflecting optical waveguide technology is exploited. An extinction of 37 dB, a narrow rejection band of only 2.5 nm and a free spectral range of 76 nm using three specifically designed dielectric layers are demonstrated. These parameters result in an 18.4-fold increase in the signal-to-noise ratio for on-chip fluorescence detection. In addition, liquid-core waveguide filters with three operating wavelengths were designed for Förster resonance energy transfer detection and demonstrated using doubly labeled oligonucleotides. Incorporation of high-performance spectral processing illustrates the power of the optofluidic concept where fluidic channels also perform optical functions to create innovative and highly integrated lab-on-chip devices.

Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission

Micrometer-sized hollow antiresonant reflecting optical waveguides on silicon substrates have been previously demonstrated with liquid and gas-filled cores. Previous designs have nonideal geometries, with nonuniform lateral layers around the hollow core, resulting in higher loss than could potentially be achieved. A new design and fabrication process has been developed involving hollow waveguide fabrication on a self-aligned pedestal (SAP) using anisotropic plasma etching. With the SAP structure, the hollow core is surrounded by uniform layers and a terminal layer of air on three sides, resulting in air-core waveguide loss of 1.54 cm-1 at 785 nm and high fabrication yield.

Improving solid to hollow core transmission for integrated ARROW waveguides

Optical sensing platforms based on anti-resonant reflecting optical waveguides (ARROWs) with hollow cores have been used for bioanalysis and atomic spectroscopy. These integrated platforms require that hollow waveguides interface with standard solid waveguides on the substrate to couple light into and out of test media. Previous designs required light at these interfaces to pass through the anti-resonant layers.We present a new ARROW design which coats the top and sides of the hollow core with only SiO2, allowing for high interface transmission between solid and hollow waveguides. The improvement in interface transmission with this design is demonstrated experimentally and increases from 35% to 79%. Given these parameters, higher optical throughputs are possible using single SiO2 coatings when hollow waveguides are shorter than 5.8 mm.

Optofluidic notch filter integration by lift-off of thin films

Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides the means for localized, on-chip optical filtering. We present a lift-off technique, compatible with thin-film processing including plasma-enhanced chemical vapor and sputtering deposition. The resulting optofluidic notch filters exhibited a 20 dB rejection with linewidths as low as 20 nm for ~1 cm long chips consisting of liquid-core and solid-core waveguides.

Multi-mode mitigation in an optofluidic chip for particle manipulation and sensing

A new waveguide design for an optofluidic chip is presented. It mitigates multi-mode behavior in solid and liquid-core waveguides by increasing fundamental mode coupling to 82% and 95%, respectively. Additionally, we demonstrate a six-fold improvement in lateral confinement of optically guided dielectric microparticles and double the detection efficiency of fluorescent particles.

Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides

We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2) and SiN layers of the waveguides, leaving a thin SiN membrane above the hollow core. Nanopores are formed in the SiN membranes using a focused ion-beam etch process that provides control over the pore size. Openings as small as 20 nm in diameter are created. Optical loss measurements indicate that micropores did not significantly alter the loss along the waveguide.

Optimization of Interface Transmission Between Integrated Solid Core and Optofluidic Waveguides

Optofluidic waveguides have been integrated with solid core waveguides on silicon using an antiresonant reflecting optical waveguide (ARROW) design. Interface transmission between solid and liquid core waveguides is one of the most important factors for overall optical throughput. The optimization of interface transmission by adjusting the thickness of top waveguide cladding layers was demonstrated experimentally and theoretically. The measured coupling efficiency increases from 18% to 67% and the overall throughput was improved 17× due to improved mode matching while liquid core waveguides maintain a low average loss coefficient.