Donna Jean Clodgo

Method for a plasma-treated polysiloxane coating

Barrierless high-temperature lift-off process

Planarizing ladder-type silsesquioxane polymer insulation layer

Method of forming organoglass layers and applications of such a method

Barrierless high-temperature lift-off process for forming a patterned interconnection layer

Etch resistant pattern formation via interfacial silylation process

FORMATION OF ORGANIC GLASS INSULATING LAYER

Formation of conductor pattern

Planarisierung einer leiterartigen Isolationsschicht aus Silsesquioxan-Polymer

Hochtemperatur abhebeverfahren ohne zwischenschicht fuer eine strukturierte zwischenverbindungsschicht. High temperature lift-off between link layer for a structured without intermediate layer.