Douglas A. Longworth | Researchain

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Featured researches published by Douglas A. Longworth.

Archive | 1994

Coated flash evaporator heater

John Mariner; Timothy J. Hejl; Douglas A. Longworth; Lawrence E. Finley

Archive | 2004

Wafer handling apparatus and method of manufacturing thereof

John Thomas Mariner; Timothy J. Hejl; Douglas A. Longworth; Jeffrey Lennart; Ajit Y. Sane; Andrew Macey; Jon Leist; Thomas Devan

Archive | 1996

High density flash evaporator

John Mariner; Douglas A. Longworth

Archive | 2006

ETCH RESISTANT HEATER AND ASSEMBLY THEREOF

Akinobu Otaka; Takeshi Higuchi; Sridhar Ramaprasad Prasad; Wei Fan; Marc Schaepkens; Douglas A. Longworth

Archive | 1994

Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating

John Mariner; Douglas A. Longworth

Archive | 2008

Wafer processing device for use in semiconductors processing chamber for production of semiconductors, has base substrate on which wafer is located, where filler seals gap in device

Benjamin John Olechnowicz; David M. Rusinko; Wei Fan; Demetrius Sarigiannis; Marc Schaepkens; Douglas A. Longworth; Victor Lienkong Lou; Xiang Liu; Jennifer Klug

Archive | 2007

Langlebiges Graphitverbindungselement und Verfahren zum Herstellen desselben

Douglas A. Longworth; Zhong-Hao Lu; Timothy J. Hejl; Xiang Liu

Archive | 2007

Low thermal conductivity low density pyrolytic boron nitride material, method of making, and articles made therefrom

Marc Schaepkens; Demetrius Sarigiannis; Douglas A. Longworth

Archive | 2006

CORROSION RESISTANT WAFER PROCESS DEVICE AND MANUFACTURING METHOD THEREFOR

Wei Fan; Jennifer Klug; Xiang Liu; Douglas A. Longworth; Victor Lienkong Lou; Benjamin John Olechnowicz; David Michael Rusinko; Demetrius Sarigiannis; Marc Schaepkens; ジェイオレフノビチ，ベンジャミン; クルーグ，ジェニファー; サリジアニス，デメトリアス; スシャープケン，マーク; ウェイファン; エムラシンコ，デイビット; リュー，ジアン; エルルー，ビクター; エイロングワース，ダグラス

Archive | 1995