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Demetrius Sarigiannis

Micron Technology

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Publication

Featured researches published by Demetrius Sarigiannis.

Archive | 2003

Insitu post atomic layer deposition destruction of active species

Demetrius Sarigiannis; Shuang Meng; Garo J. Derderian

Archive | 2005

Atomic layer deposition method of forming an oxide comprising layer on a substrate

Garo J. Derderian; Demetrius Sarigiannis; Shuang Meng

Archive | 2003

Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces

Cem Basceri; Trung T. Doan; Ronald A. Weimer; Kevin L. Beaman; Lyle D. Breiner; Lingyi A. Zheng; Er-Xuan Ping; Demetrius Sarigiannis; David J. Kubista

Archive | 2003

Systems and methods for depositing material onto microfeature workpieces in reaction chambers

Demetrius Sarigiannis; Shuang Meng; Garo J. Derderian

Archive | 2004

Apparatuses and methods for producing chemically reactive vapors used in manufacturing microelectronic devices

Demetrius Sarigiannis; Garo J. Derderian

Archive | 2009

Methods of depositing materials over substrates and methods of forming layers over substrates

Demetrius Sarigiannis; Garo J. Derderian; Cem Basceri

Archive | 2003

Methods of forming trenched isolation regions

Demetrius Sarigiannis; Garo J. Derderian; Cem Basceri

Archive | 2002

Atomic layer deposition apparatus and methods

Garo J. Derderian; Cem Basceri; Gurtej S. Sandhu; Demetrius Sarigiannis

Archive | 2004

Methods of forming layers over substrates

Demetrius Sarigiannis; Garo J. Derderian; Cem Basceri

Archive | 2006

Method of removing residual contaminants from an environment

Demetrius Sarigiannis; Cem Basceri; Chris W. Hill; Garo J. Derderian

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Collaboration

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Garo J. Derderian

Micron Technology

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Cem Basceri

Micron Technology

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Shuang Meng

Micron Technology

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Chris W. Hill

Micron Technology

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David J. Kubista

Micron Technology

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Er-Xuan Ping

Micron Technology

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Gurtej S. Sandhu

Micron Technology

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Joel A. Drewes

Micron Technology

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Kevin L. Beaman

Micron Technology

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Lingyi A. Zheng

Micron Technology

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