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Dive into the research topics where Douglas E. Holmgren is active.

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Featured researches published by Douglas E. Holmgren.


Archive | 2002

Multiple electron beam lithography system with multiple beam modulated laser illumination

Marian Mankos; Steven T. Coyle; Andres Fernandez; Allan L. Sagle; Paul C. Allen; Xiaolan Chen; Douglas E. Holmgren; Windsor E. Owens; Jeffrey S. Sullivan; Timothy N. Thomas; Mark A. Gesley


Archive | 1999

Electron beam column using high numerical aperture photocathode source illumination

Paul C. Allen; Xiaolan Chen; Douglas E. Holmgren; Samuel C. Howells


Archive | 2012

Novel thermal processing apparatus

Stephen Moffatt; Douglas E. Holmgren; Samuel C. Howells; Edric Tong; Bruce E. Adams; Jiping Li; Aaron Muir Hunter


Archive | 2000

ELECTRON BEAM COLUMN USING HIGH NUMERICAL APERTURE ILLUMINATION OF THE PHOTOCATHODE

Paul C. Allen; Xiaolan Chen; Douglas E. Holmgren; Samuel C. Howells


Archive | 2012

Optical design for line generation using microlens array

Douglas E. Holmgren; Samuel C. Howells


Archive | 2014

FIBER ARRAY LINE GENERATOR

Douglas E. Holmgren; Samuel C. Howells; Aaron Muir Hunter; Theodore P. Moffitt; Diwakar N. Kedlaya


Archive | 2012

Multiple beam combiner for laser processing apparatus

Stephen Moffatt; Douglas E. Holmgren; Samuel C. Howells; Edric Tong; Bruce E. Adams; Jiping Li; Aaron Muir Hunter


Archive | 2017

Novel thermal treatment apparatus

Stephen Moffatt; Douglas E. Holmgren; Samuel C. Howells; Tong Edric; Bruce E. Adams; Li Jiping; Aaron Muir Hunter


Archive | 2016

CUSTOMIZED PUPIL STOP SHAPE FOR CONTROL OF EDGE PROFILE IN LASER ANNEALING SYSTEMS

Douglas E. Holmgren


Archive | 2016

SEMICONDUCTOR PROCESSING METHOD AND SEMICONDUCTOR DEVICE

Stephen Moffatt; Abhilash J. Mayur; Theodore P. Moffitt; Aaron Muir Hunter; Shashank Sharma; Bruce E. Adams; Samuel C. Howells; Douglas E. Holmgren; Wolfgang Aderhold

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