Meeting Abstracts | 2007
Douwe J. Monsma; Jill Becker
The Savannah series are not only compact, but able to run all precursors thanks to a fully heated 6 port delivery system. Due to the small reactor volume, the consumption of precursors and high purity gases is many orders of magnitude lower than before, making the cost of ownership comparable to that of an evaporator. A standard stop-valve option allows exposure mode deposition, which enables ultra-high aspect ratio uniform coatings (>1:1000), such as inside porous substrates.
Archive | 2009
Jill Svenja Becker; Roger R. Coutu; Douwe J. Monsma
Archive | 2005
Douwe J. Monsma; Jill Becker
Archive | 2009
Jill Svenja Becker; Roger R. Coutu; Douwe J. Monsma
Archive | 2009
Roger R. Coutu; Jill Svenja Becker; Douwe J. Monsma
Meeting Abstracts | 2008
Ganesh Sundaram; Douwe J. Monsma; Jill Svenja Becker
Archive | 2005
Douwe J. Monsma; Jill Becker
Archive | 2005
Douwe J. Monsma; Jill Becker
Archive | 2005
Douwe J. Monsma; Jill Becker
Archive | 2005
Douwe J. Monsma; Jill Becker
