Douwe J. Monsma

Savannah ALD Systems: Enabling Quick Results

The Savannah series are not only compact, but able to run all precursors thanks to a fully heated 6 port delivery system. Due to the small reactor volume, the consumption of precursors and high purity gases is many orders of magnitude lower than before, making the cost of ownership comparable to that of an evaporator. A standard stop-valve option allows exposure mode deposition, which enables ultra-high aspect ratio uniform coatings (>1:1000), such as inside porous substrates.