Dustin Wade Carr

Crystalline silicon tilting mirrors for optical cross-connect switches

This paper discusses a two-piece approach for fabricating two-dimensional (2-D) arrays of tilting MEMS mirrors with application in very-large optical cross-connect switches. In the new process, a two-sided etching of silicon-on-insulator (SOI) wafers is used to create crystalline mirrors on a first wafer that is later aligned and bonded to a separate wafer containing the activation electrodes, traces, and bond pads. The approach allows a very close spacing of mirror elements and a very simple design for the mechanical structures, and also greatly simplifies wire routing.

In-Plane Nano-G Accelerometer Based on an Optical Resonant Detection System

We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. We previously built some of the most sensitive displacement sensors with displacement sensitivities as low as 12 fin/radicHz at 1 kHz. Using reference detection circuitry in conjunction with correlated double sampling methods, we have lowered the 1/f noise floor to 10 milli-Hz, hence improving the detection limit at low frequencies (10 milli-Hz) from 37 pm/radicHz to 50 fm/radicHz i.e. by 57.3 dB. We have developed the capability to convert these highly sensitive displacement sensors to highly sensitive acceleration sensors through innovative low-stress mass addition and direct mass integration processes. We have built accelerometers with resonant frequencies as low as 43 Hz and thermal noise floors as low as 10 nG/radicHz. We have pushed the limits of shaker table experiments to verify direct acceleration measurements as low as 10 muG/radicHz.

Integrated NEMS and Optoelectronics for Sensor Applications

This work utilized advanced engineering in several fields to find solutions to the challenges presented by the integration of MEMS/NEMS with optoelectronics to realize a compact sensor system, comprised of a microfabricated sensor, VCSEL, and photodiode. By utilizing microfabrication techniques in the realization of the MEMS/NEMS component, the VCSEL and the photodiode, the system would be small in size and require less power than a macro-sized component. The work focused on two technologies, accelerometers and microphones, leveraged from other LDRD programs. The first technology was the nano-g accelerometer using a nanophotonic motion detection system (67023). This accelerometer had measured sensitivity of approximately 10 nano-g. The Integrated NEMS and optoelectronics LDRD supported the nano-g accelerometer LDRD by providing advanced designs for the accelerometers, packaging, and a detection scheme to encapsulate the accelerometer, furthering the testing capabilities beyond bench-top tests. A fully packaged and tested die was never realized, but significant packaging issues were addressed and many resolved. The second technology supported by this work was the ultrasensitive directional microphone arrays for military operations in urban terrain and future combat systems (93518). This application utilized a diffraction-based sensing technique with different optical component placement and a different detection scheme from the nano-g accelerometer. The Integrated NEMS LDRD supported the microphone array LDRD by providing custom designs, VCSELs, and measurement techniques to accelerometers that were fabricated from the same operational principles as the microphones, but contain proof masses for acceleration transduction. These devices were packaged at the end of the work.

Fabrications of PVDF Gratings: Final Report for LDRD Project 79884

The purpose of this project was to do some preliminary studies and process development on electroactive polymers to be used for tunable optical elements and MEMS actuators. Working in collaboration between Sandia National Labs and The University of Illinois Urbana-Champaign, we have successfully developed a process for applying thin films of poly (vinylidene fluoride) (PVDF) onto glass substrates and patterning these using a novel stamping technique. We observed actuation in these structures in static and dynamic measurements. Further work is needed to characterize the impact that this approach could have on the field of tunable optical devices for sensing and communication.

Multiplexed fiber-coupled accelerometers for security monitoring applications

This paper describes the design and performance of a new all optical fiber-coupled Fabry-Perot (FP) acceleration and vibration sensor. This device can be readily multiplexed with up to eight other sensors on a single interrogation channel, and an existing state of the art Fiber Bragg Grating (FBG) swept-wavelength interrogation system can be used to monitor the sensor response. The ease of multiplexing combined with passive operation leads to an effective solution for monitoring vibration at many different points across a wide area, with minimal cost of deployment. We will also describe tests of a fiber conduit security monitoring application.

A Laser Interferometric Miniature Sensor

This is the second year of a Phase II Small Business Innovation Research (SBIR) contract geared towards the development of a new seismic sensor. Ground-based seismic monitoring systems have proven to be very capable in identifying nuclear tests, and can provide somewhat precise information on the location and yield of the explosive device. Making these measurements, however, currently requires very expensive and bulky seismometers that are difficult to deploy in places where they are most needed. A high performance, compact device can enable rapid deployment of large scale arrays, which can in turn be used to provide higher quality data during times of critical need. The use of a laser interferometer-based device has shown considerable promise, while also presenting significant challenges. The greatest strength of this optical readout technique is the ability to decouple the mechanical design from the transducer, thus enabling a miniaturized design that is not accessible with conventional sensing techniques. However, the nonlinearity in the optical response must be accounted for in the sensor output. Previously, we had proposed using a force-feedback approach to position the sensor at a point of maximum linearity. However, it can be shown that the combined nonlinearities of the optical response andmorexa0» the force-feedback curve necessarily results in a significant amount of unwanted noise at low frequencies. Having realized this, we have developed a new approach that eliminates force feedback, allowing the proof mass to move freely at all times. This takes advantage of some advanced optical spatial filtering that was developed at Symphony Acoustics for other types of sensors, and was recently adapted to this work. After processing the signals in real time, the digital output of the device is intrinsically linear, and the sensor can operate at any orientation with the same level of resolution, while instantly adapting to significant changes in orientation. Ultimately, we expect the dynamic range to be up to 180 dB. Currently, we have observed the noise floor in a 0.1 Hz to 10 Hz bandwidth to be near -160 dB/Hz relative to 1 m2/s4. To meet the objectives of this program, we are finalizing the design of a 3 axis sensor for shallow borehole deployments, with a diameter of 40 mm and a length a 150 mm.«xa0less