E. A. Kralkina

Self-consistent model of an inductive rf plasma source in an external magnetic field

A theory is developed that makes it possible to calculate RF power absorption in an inductive plasma source. Conditions are determined under which most of the power is deposited in the plasma. It is shown that these conditions correspond to the excitation of spatial waves (an oblique Langmuir wave and a helicon wave). A simple self-consistent model of a plasma source is proposed that describes all of the experimentally observed distinctive properties of plasma sources well.

RF power absorption by plasma of a low-pressure inductive discharge

This paper aims to analyze the mechanism of power absorption and to reveal, both experimentally and numerically, the basic factors determining the ability of plasma to absorb RF power. This is done by determining the plasma equivalent resistance value under different conditions in a low-pressure RF inductive discharge such as different antenna shape, working gas pressure, electron density, operating frequency and geometrical dimensions of the plasma source. Experimental and numerical results show that the plasma equivalent resistance changes non-monotonously with an increase in electron density, increases with an increase in neutral gas pressure, and that the maximum plasma equivalent resistance shifts toward higher electron densities when the operating frequency is increased.

Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are described. It is shown that an increase in the external magnetic field leads to the formation of a plasma column and a shift of the maximum ion current along the discharge axis toward the bottom flange of the system. The shape of the plasma column can be controlled via varying the configuration of the magnetic field.

The impact of the Ramsauer effect on the frequency of elastic collisions in inductive RF discharges in inert gases

This paper presents the results of investigating the power absorption mechanism of an inductive RF discharge plasma. Dependences of the frequency of elastic electron collisions with inert gas atoms (helium, neon, argon, and krypton) on the pressure are given. In the frequency range of 3 × 106–3 × 107 s−1, an equivalent plasma resistance and the power input into the plasma are determined by the values of collision frequency and electron density within a skin layer and do not depend on the type of gas within the limits of experimental error. Upon reaching the electron temperature of ∼1 eV, the energy of the main part of electrons lies in the range of Ramsauer’s minimum for elastic cross section. This leads to a decreasing elastic-collision frequency in heavy inert gases as compared to helium.

Self-Consistent Model of an RF Inductive Plasma Source Located in an External Magnetic Field

A theory for calculating plasma resistance and the RF power absorbed in an inductive plasma source is developed. Conditions are determined under which most of the power is absorbed by the plasma. It is shown that these conditions correspond to excitation of spatial waves (oblique Langmuir wave and helicon). A simple self-consistent model of the plasma source is proposed, which explains the specific features of the plasma sources experimentally observed.

Hybrid plasma system for magnetron deposition of coatings with ion assistance

The results of the study of the plasma hybrid system based on the combined magnetron discharge and high-frequency inductive discharge located in the external magnetic field is presented. Magnetron discharge provides the generation of atoms and ions of the target materials while the flow of accelerated ions used for the ion assistance is provided by the RF inductive discharge. An external magnetic field is used to optimize the power input to the discharge, to increase the ion current density in the realm of substrate and to enhance the area of uniform plasma. The joint operation of magnetron and RF inductive discharge leads to a substantial increase (not equal to the sum of the parameters obtained under separate operation of two hybrid system channels) of the ion current density and intensity of sputtered material spectral lines radiation. Optimal mode of the hybrid plasma system operation provides uniform ion current density on the diameter of at least 150mm at 0.7PA argon pressure. The optimal values of the magnetic fields in the region of the substrate location lie in the range 2-8 mTl, while in the region of the RF input power unit lie in the range 0.5-25 mTl.

Radial inhomogenity of plasma parameters in a low-pressure inductive RF discharge

This work is devoted to systematic investigation into the radial dependence of the plasma parameters of a low-pressure inductive radio-frequency (RF) discharge on pressure within a wide range of 0.8–1 Torr. Experimental results that were obtained under the considered pressures make it possible to analyze the patterns of the changes in plasma parameters upon both a nonlocal mode of discharge and a transition from a nonlocal to local mode of the RF power input. Discharges in helium, neon, argon, and krypton were considered. Experimental data were compared to the results of the numerical simulation of the inductive RF discharge using the particle-in-cell (PIC) method.

RF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field

Present paper is aimed to reveal experimentally and theoretically the influence of magnetic field strength, antenna shape, pressure, operating frequency and geometrical size of plasma sources on the ability of plasma to absorb the RF power characterized by the equivalent plasma resistance for the case of low pressure RF inductive discharge located in the external magnetic field. The distinguishing feature of the present paper is the consideration of the antennas that generate not only current but charge on the external surface of plasma sources. It is shown that in the limited plasma source two linked waves can be excited. In case of antennas generating only azimuthal current the waves can be attributed as helicon and TG waves. In the case of an antenna with the longitudinal current there is a surface charge on the side surface of the plasma source, which gives rise to a significant increase of the longitudinal and radial components of the RF electric field as compared with the case of the azimuthal anten...

Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System

The following must be added at the end of Acknowledgments:The study by JSC Research Institute of Precision Machine Manufacturing was supported by the Ministry of Education and Science of the Russian Federation, Agreement no. 14.576.21.0021 dated June 30, 2014. The unique identifier of this applied research project is RFMEF157614X0021.

Plasma parameters in a dual-camera low-power inductive RF discharge with an external magnetic field

The results from studying a dual-camera inductive radio-frequency (RF) discharge that was placed in an external magnetic field are presented. The operating conditions were as follows: an argon pressure of 5 × 10–5–6 × 10–2 Torr, an external magnetic field strength of 0–60 G, and an RF generator power supply of 25–300 W. During the experiment the resonant RF power consumption and the correspondence between the local power-consumption maxima and spatial maxima of the plasma concentration as a function of the external magnetic field were observed. The comparison of the experimental results with the results of the mathematical simulation indicates that the resonant character of the discharge is associated with the excitation of helicons and Trivelpiece–Gould waves.