V. B. Pavlov

Self-consistent model of an inductive rf plasma source in an external magnetic field

A theory is developed that makes it possible to calculate RF power absorption in an inductive plasma source. Conditions are determined under which most of the power is deposited in the plasma. It is shown that these conditions correspond to the excitation of spatial waves (an oblique Langmuir wave and a helicon wave). A simple self-consistent model of a plasma source is proposed that describes all of the experimentally observed distinctive properties of plasma sources well.

Properties of a low-pressure inductive RF discharge I: Experiment

Results are presented from experimental studies of low-pressure inductive RF discharges (including those with a capacitive component) employed in plasma technology. It is shown that both the RF power absorbed in the plasma and the electron density depend nonmonotonically on the external magnetic field. Discharge disruptions occurring at critical values of the magnetic field and the spatial redistribution and hysteresis of the plasma parameters were observed when varying the magnetic field and RF generator power. The parameters of the plasma of low-pressure (0.5–5 mTorr) inductive RF discharges were investigated, and the discharge properties related to the redistribution of the RF generator power between the plasma and the discharge external circuit were revealed. The experiments were performed with both conventional unmagnetized inductive plasma sources and plasma sources with a magnetic field.

RF power absorption by plasma of a low-pressure inductive discharge

This paper aims to analyze the mechanism of power absorption and to reveal, both experimentally and numerically, the basic factors determining the ability of plasma to absorb RF power. This is done by determining the plasma equivalent resistance value under different conditions in a low-pressure RF inductive discharge such as different antenna shape, working gas pressure, electron density, operating frequency and geometrical dimensions of the plasma source. Experimental and numerical results show that the plasma equivalent resistance changes non-monotonously with an increase in electron density, increases with an increase in neutral gas pressure, and that the maximum plasma equivalent resistance shifts toward higher electron densities when the operating frequency is increased.

The inductive channel effect on the parameters of the space-charge electrode sheaths in a hybrid RF discharge

The physical properties of a new modification of RF discharge—hybrid RF discharge (HRFD)—are studied experimentally. A HRFD is sustained by both the vortical RF electric field and the potential one generated by the inductive and capacitive channels of the discharge. The inductive channel effect on the parameters of the space-charge electrode sheaths, which determine the capacitive component of the physical mechanism of a HRFD, is discussed.

Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are described. It is shown that an increase in the external magnetic field leads to the formation of a plasma column and a shift of the maximum ion current along the discharge axis toward the bottom flange of the system. The shape of the plasma column can be controlled via varying the configuration of the magnetic field.

The impact of the Ramsauer effect on the frequency of elastic collisions in inductive RF discharges in inert gases

This paper presents the results of investigating the power absorption mechanism of an inductive RF discharge plasma. Dependences of the frequency of elastic electron collisions with inert gas atoms (helium, neon, argon, and krypton) on the pressure are given. In the frequency range of 3 × 106–3 × 107 s−1, an equivalent plasma resistance and the power input into the plasma are determined by the values of collision frequency and electron density within a skin layer and do not depend on the type of gas within the limits of experimental error. Upon reaching the electron temperature of ∼1 eV, the energy of the main part of electrons lies in the range of Ramsauer’s minimum for elastic cross section. This leads to a decreasing elastic-collision frequency in heavy inert gases as compared to helium.

Experimental study of patterns of energy input into hybrid low pressure discharge for varying RF generator power and argon pressure

Patterns of energy release in the plasma of a new modification of RF discharge, viz., hybrid RF discharge, which are maintained by vortex and potential RF electric fields, are experimentally studied. RF power input unit in the form of inductor and capacitor plates connected in parallel are used for initiating this discharge. This paper presents data obtained during the investigation of the influence of power supplied to the plasma and argon pressure on the equivalent resistance of the hybrid discharge, which is the measure of plasma capability of absorbing RF power. The role of the capacitive channel in the balance of RF power supplied to the discharge is considered.

Self-Consistent Model of an RF Inductive Plasma Source Located in an External Magnetic Field

A theory for calculating plasma resistance and the RF power absorbed in an inductive plasma source is developed. Conditions are determined under which most of the power is absorbed by the plasma. It is shown that these conditions correspond to excitation of spatial waves (oblique Langmuir wave and helicon). A simple self-consistent model of the plasma source is proposed, which explains the specific features of the plasma sources experimentally observed.

Mathematical simulation of a low-pressure capacitive RF discharge in an external radial magnetic field using the KARAT code

A high-frequency capacitive discharge is simulated in the geometry of a plasma accelerator with closed electron drift. It has been shown that, in such a discharge, as in a dc discharge, an azimuthal electron drift takes place and a potential drop is formed at the discharge channel exit, which leads to the emergence of an accelerated ion beam from the channel.

Hybrid plasma system for magnetron deposition of coatings with ion assistance

The results of the study of the plasma hybrid system based on the combined magnetron discharge and high-frequency inductive discharge located in the external magnetic field is presented. Magnetron discharge provides the generation of atoms and ions of the target materials while the flow of accelerated ions used for the ion assistance is provided by the RF inductive discharge. An external magnetic field is used to optimize the power input to the discharge, to increase the ion current density in the realm of substrate and to enhance the area of uniform plasma. The joint operation of magnetron and RF inductive discharge leads to a substantial increase (not equal to the sum of the parameters obtained under separate operation of two hybrid system channels) of the ion current density and intensity of sputtered material spectral lines radiation. Optimal mode of the hybrid plasma system operation provides uniform ion current density on the diameter of at least 150mm at 0.7PA argon pressure. The optimal values of the magnetic fields in the region of the substrate location lie in the range 2-8 mTl, while in the region of the RF input power unit lie in the range 0.5-25 mTl.