E. Robinson

Electrooptical Characterization of MWIR InAsSb Detectors

InAs1−xSbx material with an alloy composition of the absorber layer adjusted to achieve 200-K cutoff wavelengths in the 5-μm range has been grown. Compound-barrier (CB) detectors were fabricated and tested for optical response, and Jdark–Vd measurements were taken as a function of temperature. Based on absorption coefficient information in the literature and spectral response measurements of the midwave infrared (MWIR) nCBn detectors, an absorption coefficient formula α(Ε, x, T) is proposed. Since the presently suggested absorption coefficient is based on limited data, additional measurements of material and detectors with different x values and as a function of temperature should refine the absorption coefficient, providing more accurate parametrization. Material electronic structures were computed using a k·p formalism. From the band structure, dark-current density (Jdark) as a function of bias (Vd) and temperature (T) was calculated and matched to Jdark–Vd curves at fixed T and Jdark–T curves at constant Vd. There is a good match between simulation and data over a wide range of bias, but discrepancies that are not presently understood exist near zero bias.

MWIR InAsSb barrier detector data and analysis

Mid-wavelength infrared (MWIR) InAsSb alloy barrier detectors grown on GaAs substrates were characterized as a function of temperature to evaluate their performance. Detector arrays were fabricated in a 1024 × 1024 format on an 18 μm pitch. A fanout was utilized to directly acquire data from a set of selected detectors without an intervening read out integrating circuit (ROIC). The detectors have a cutoff wavelength equal to ~ 4.9 μm at 150 K. The peak internal quantum efficiency (QE) required a reverse bias voltage of 1 V. The detectors were diffusion-limited at the bias required to attain peak QE. Multiple 18 μm × 18 μm detectors were tied together in parallel by connecting the indium bump of each detector to a single large metal pad on the fanout. The dark current density at -1 V bias for a set of 64 × 64 and 6 × 6 array of detectors, each of which were tied together in parallel was ~ 10-3 A/cm2 at 200 K and 5 × 10-6 A/cm2 at 150 K. The 4096 (64 × 64) and 36 (6 × 6) detectors, both have similar Jdark vs Vd characteristics, demonstrating high operability and uniformity of the detectors in the array. The external QE measured using a narrow band filter centered at ~ 4 μm had values in the 65 – 70 % range. Since the detectors were illuminated through a GaAs substrate which has a reflectance of 29%, the internal QE is greater than 90 %. A 1024 × 1024 ROIC on an 18 μm pitch was also designed and fabricated to interface with the barrier detectors. QE at 150 K for a 1024 × 1024 detector array hybridized to a ROIC matched the QE measured on detectors that were measured directly through a fanout chip. Median D* at 150 K under a flux of 1.07 × 1015 ph/(cm2/s was 1.0 x 1011 cm Hz1/2 /W.

MWIR InAs 1-x Sb x nCBn detectors data and analysis

In InAs1-xSbx material alloy composition was adjusted to achieve 200K cutoff wavelengths in the 5 μm range. Reflectance was minimized and absorption in the InAs1-xSbx material maximized by the use of pyramid shaped structures fabricated in the InAs1-xSbx material which function as an AR coating. Compound-barrier (CB) detectors were fabricated and tested for optical response and dark current density versus bias measurements were acquired as a function of temperature. For 5 μm cutoff detectors, QE is high, ~ 75 % between 4.0 μm and 4.6 μm and > 80 % between 2.0 μand 4.0 μm, demonstrating the efficacy of the pyramids as photon trap structures and as a replacement for multi-layer AR-coatings. Jdark in the low 10-3 A/cm2 range at 200 K and low 10-5 A/cm2 range at 150 K was measured at the bias at which the QE peaked.

Fabrication of high-operating temperature (HOT), visible to MWIR, nCBn photon-trap detector arrays

We describe our recent efforts in developing visible to mid-wave (0.5 µm to 5.0 µm) broadband photon-trap InAsSb-based infrared detectors grown on GaAs substrates operating at high temperature (150-200K) with low dark current and high quantum efficiency. Utilizing an InAsSb absorber on GaAs substrates instead of an HgCdTe absorber will enable low-cost fabrication of large-format, high operating temperature focal plane arrays. We have utilized a novel detector design based-on pyramidal photon trapping InAsSb structures in conjunction with compound barrier-based device architecture to suppress both G-R dark current, as well as diffusion current through absorber volume reduction. Our optical simulation show that our engineered pyramid structures minimize the surface reflection compared to conventional diode structures acting as a broadband anti-reflective coating (AR). In addition, it exhibits > 70-80% absorption over the entire 0.5 µm to 5.0 µm spectral range while providing up to 3× reduction in absorber volume. Lattice-mismatched InAs0.82Sb0.18 with 5.25 µm cutoff at 200K was grown on GaAs substrates. 128×128/60μm and 1024×1024/18μm detector arrays that consist of bulk absorber as well as photon-trap pyramid structures were fabricated to compare the detector performance. The measured dark current density for the diodes with the pyramidal absorber was 3× lower that for the conventional diode with the bulk absorber, which is consistent with the volume reduction due to the creation of the pyramidal absorber topology. We have achieved high D* (< 1.0 x 1010 cm √Hz/W) and maintain very high (< 80 %) internal quantum efficiency over the entire band 0.5 to 5 µm spectral band at 200K.

InAsSb detectors for visible to MWIR high-operating temperature applications

The Photon-Trap Structures for Quantum Advanced Detectors (PT-SQUAD) program requires MWIR detectors at 200 K. One of the ambitious requirements is to obtain high (> 80 %) quantum efficiency over the visible to MWIR spectral range while maintaining high D* (> 1.0 x 1011 cm √Hz/W) in the MWIR. A prime method to accomplish the goals is by reducing dark diffusion current in the detector via reducing the volume fill ratio (VFR) of the detector while optimizing absorption. Electromagnetic simulations show that an innovative architecture using pyramids as photon trapping structures provide a photon trapping mechanism by refractive-index-matching at the tapered air/semiconductor interface, thus minimizing the reflection and maximizing absorption to > 90 % over the entire visible to MWIR spectral range. InAsSb with bandgap appropriate to obtaining a cutoff wavelength ~ 4.3 μm is chosen as the absorber layer. An added benefit of reducing VFR using pyramids is that no AR-coating is required. Compound-barrier (CB) detector test structures with alloy composition of the InAsSb absorber layer adjusted to achieve 200 K cutoff wavelength of 4.3 μm (InAsSb lattice-matched to GaSb). Dark current density at 200 K is in the low 10-4 A/cm2 at Vd = -1.0 V. External QE ~ 0.65 has been measured for detectors with a Si carrier wafer attached. Since illumination is through the Si carrier wafer that has a reflectance of ~ 30 %, this results in an internal QE > 0.9.

MWIR InAsSb FPA data and analysis

InAsSb material with a cutoff wavelength in the 5 μm range has been grown on GaAs substrates. The MWIR InAsSb detector arrays were fabricated and hybridized to a ROIC to permit measurement of the electrical and optical properties of detectors. Detector arrays were fabricated in a 1024 x 1024 format on an 18 μm pitch. A fanout was utilized to directly acquire data from a set of selected detectors without an intervening read out integrating circuit (ROIC). Variable temperature Jdark vs Vd measurements have been made with the dark current density ~ 10-5 A/cm2 at 150 K. The external QE measured using a narrow band filter centered at ~ 4 μm had values in the 65 – 70 % range. Since the detectors were illuminated through a GaAs substrate, which has a reflectance of 29%, the internal QE is greater than 90%. A 1024 x 1024 ROIC on an 18 μm pitch was also designed and fabricated to interface with the barrier detectors. The ROIC operates at 30 Hz frame rate and has a well capacity of 20.7 M electrons. QE at 150 K for a 1024 x 1024 detector array hybridized to a ROIC had a median D* at 150 K under a flux of 1.07 x 1015 ph/(cm2/s) was 1.2 x 1011 cm Hz1/2 /W. The NEdT was 44 mK and imagery was obtained at 150 K using an f/2.3 MWIR lens.

Room temperature SWIR sensing from colloidal quantum dot photodiode arrays

While InGaAs-based focal plane arrays (FPAs) provide excellent detectivity and low noise for SWIR imaging applications, wider scale adoption of systems capable of working in this spectral range is limited by high costs, limited spectral response, and costly integration with Si ROIC devices. RTI has demonstrated a novel photodiode technology based on IR-absorbing solution-processed PbS colloidal quantum dots (CQD) that can overcome these limitations of InGaAs FPAs. The most significant advantage of the CQD technology is ease of fabrication. The devices can be fabricated directly onto the ROIC substrate at low temperatures compatible with CMOS, and arrays can be fabricated at wafer scale. Further, device performance is not expected to degrade significantly with reduced pixel size. We present results for upward-looking detectors fabricated on Si substrates with sensitivity from the UV to ~1.7 µm. We further show devices fabricated with larger size CQDs that exhibit spectral sensitivity that extends from UV to 2 µm.

High-performance SWIR sensing from colloidal quantum dot photodiode arrays

RTI has demonstrated a novel photodiode technology based on IR-absorbing solution-processed PbS colloidal quantum dots (CQD) that can overcome the high cost, limited spectral response, and challenges in the reduction in pixel size associated with InGaAs focal plane arrays. The most significant advantage of the CQD technology is ease of fabrication. The devices can be fabricated directly onto the ROIC substrate at low temperatures compatible with CMOS, and arrays can be fabricated at wafer scale. Further, device performance is not expected to degrade significantly with reduced pixel size. We present results for upward-looking detectors fabricated on Si substrates with sensitivity from the UV to ~1.7 μm, compare these results to InGaAs detectors, and present measurements of the CQD detectors temperature dependent dark current.

High operating temperature MCT discrete detector data and analysis

High Density Vertically Integrated Photodiodes (HDVIP) MWIR detectors were fabricated in LPE-grown Mercury Cadmium Telluride material. Devices were fabricated with two different acceptor level concentrations. The low doped n-region was held at a single concentration but the dimensions are tailored to simultaneously maintain high quantum efficiency while minimizing dark current and 1/f noise. Since this study target was for operating at high temperatures, detector I-V data was collected between 120 K and 280 K for I-Vs and 180 to 280 K for noise to understand current mechanisms that limit device performance at these elevated temperatures. Noise as a function of frequency has also been collected over the same temperature range. 1/f noise has also been modeled for MWIR detectors as a function of temperature and will be covered.

InAsSb detector and FPA data and analysis

InAsSb material with a cutoff wavelength in the 5 μm range has been grown on GaAs substrates. The MWIR InAsSb detector arrays were fabricated and hybridized to fanouts and ROICs to permit measurement of the electrical and optical properties of detectors. Detector arrays were fabricated in a 1024 x 1024 format on an 18 μm pitch. A fanout was utilized to directly acquire data from a set of selected detectors without an intervening read out integrating circuit (ROIC). Variable temperature Jdark vs Vd measurements have been made with the dark current density ~ 10-5 A/cm2 at 150 K. The external QE measured using a narrow band filter centered at ~ 4 μm had values in the 65 - 70 % range. Since the detectors were illuminated through a GaAs substrate which has a reflectance of 29%, the internal QE is greater than 90 %. A 1024 x 1024 ROIC on an 18 μm pitch was also designed and fabricated to interface with the barrier detectors. The ROIC operates at 30 Hz frame rate and has a well capacity of 20.7 M electrons. QE at 150 K for a 1024 x 1024 detector array hybridized to a ROIC had a median D* at 150 K under a flux of 1.07 x 1015 ph/(cm2/s was 1.2 x 1011 cm Hz1/2 /W. The NEdT was 44 mK and imagery was obtained at 150 K using an f/2.3 MWIR lens.