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SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation | 1995

Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite

Eric Louis; Eberhard Adolf Spiller; Salim Abdali; Finn Erland Christensen; Harm-Jan Voorma; Norbert Koster; Peter K. Frederiksen; Charles S. Tarrio; Eric M. Gullikson; Fred Bijkerk

We carried out experiments to determine the optimum parameters for the production of multilayer x-ray mirrors for the lambda equals 4.4 - 7.1 nm range using electron beam evaporation and ion-polishing. We report on the deposition of Co/C and Ni/C coatings, of which we polished the metal layers with Kr+- and Ar+- ions of 300, 500, and 1000 eV. We examined the effect of different polishing parameters on the smoothening of the Co- and Ni-layers. The in-situ reflectivity of lambda equals 3.16 nm during deposition and the ex-situ grazing incidence reflectivity of Cu-K(alpha ) radiation (lambda equals 0.154 nm) were used to analyze the coatings. We found optimum performance of the mirrors when applying polishing for 40 s with 500 eV Kr+-ions at an angle of 20 degrees and an ion beam current of 20 mA. Using these parameters, we produced Co/C multilayer coatings on forty flat super-polished 6 multiplied by 6 cm2 Si (111) crystals for the Objective Crystal Spectrometer on the Russian Spectrum Rontgen Gamma satellite. The coatings on the flight crystals have a period Lambda of 3.95 plus or minus 0.02 nm and a reflectivity of more than 8% averaged over s- and p-polarization over the entire wavelength range of interest. We present a detailed analysis of the coatings on the crystals.


SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation | 1995

Normal incidence optics for solar coronal imaging

Eberhard Adolf Spiller; Janusz Stanislaw Wilczynski; Leon Golub; George U. Nystrom; Eric M. Gullikson; Charles S. Tarrio

We have produced two new normal incidence soft x-ray telescope mirrors coated for lambda equals 63.5 angstrom wavelength: the first with a focal length f equals 1.5 m and a diameter of 25 cm for the Space Weather and Terrestrial Hazards (SWATH) satellite and the second (f equals 2 m, diameter 27.5 cm) for launch by sounding rocket (NIXT). We describe figuring and polishing of the mirror surfaces and deposition and testing of the multilayer coatings. Optimization of the mirror fabrication included grazing incidence x-ray reflectivity for quality control during polishing. In addition, the substrate and each metal layer of the Co-C multilayer coating were polished by an ion beam with in-situ roughness estimation. We explored the possibilities and limitations of telescopes for shorter wavelengths by coating several small mirrors covering the lambda equals 45 to 60 angstrom region at normal incidence and report on their performance.


SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation | 1995

Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing

Salim Abdali; Finn Erland Christensen; Eberhard Adolf Spiller; Eric Louis; Harm-Jan Voorma

Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.


Proceedings SPIE 2515 | 1995

Multilayer Mirrors for the Objective Crystal Spectrometer on the Spectrum Röntgen Gamma Satellite

Eric Louis; Eberhard Adolf Spiller; Salim Abdali; Finn Erland Christensen; Harm-Jan Voorma; Norbert Koster; Peter K. Frederiksen; Charles S. Tarrio; Eric M. Gullikson; Fred Bijkerk


Proc 25th Annual BACUS Symp on Photomask Technology | 2005

Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin

Pei-Yang Yan; Eberhard Adolf Spiller; Eric M. Gullikson; Shannon B. Hill


Trends in Optics and Photonics | 1996

Post-Polish Figuring of Optical Surfaces Using Multilayer Deposition, ed. by G. Kubiak and D. Kania

Charles S. Tarrio; Eberhard Adolf Spiller; Christopher J. Evans; Thomas B. Lucatorto; Charles W. Clark


Proc. SPIE 2515 | 1995

Normal-Incidence Optics for Solar Coronal Imaging,

Eberhard Adolf Spiller; Janusz Stanislaw Wilczynski; Leon Golub; George U. Nystrom; Eric M. Gullikson; Charles S. Tarrio


Archive | 1992

The normal incidence soft X-ray, lambda = 63.5 , telescope of 1991.

Eberhard Adolf Spiller; Janusz Stanislaw Wilczynski; Leon Golub; George U. Nystrom


Archive | 1982

A Normal Incidence X-ray Telescope for Solar Studies

Leon Golub; R. Rosner; G. S. Vaiana; M. V. Z. Zombeck; Eberhard Adolf Spiller; Janusz Stanislaw Wilczynski


Archive | 1974

Optical waveguide lens

John Sanford Harper; Eric Gung-Hwa Lean; Eberhard Adolf Spiller; Janusz Stanislaw Wilczynski

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Charles S. Tarrio

National Institute of Standards and Technology

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Eric M. Gullikson

National Institute of Standards and Technology

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Finn Erland Christensen

Technical University of Denmark

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Salim Abdali

Technical University of Denmark

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Peter K. Frederiksen

Danish Space Research Institute

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