Edward Kirby Mcintyre
Eaton Corporation
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Publication
Featured researches published by Edward Kirby Mcintyre.
ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 | 2011
Thomas Neil Horsky; Sami K. Hahto; Edward Kirby Mcintyre; George P. Sacco
We describe our newest ClusterIon® source, and show detailed data for B18Hx+, C7H7+, C16Hx+, P4+, and As4+ beams. These species are derived from both low‐temperature solids and gaseous sources. 2D beam profiles are presented, along with mass spectra, beam current performance, and long‐term beam reproducibility. The data were collected using the injection stage of a commercial ion implanter equipped with a 120 degree analyzer magnet. Beam profiles at magnet entrance and exit planes were produced using a specially designed 2D profiler. Beam currents were measured after mass analysis using a Faraday cup over an effective energy range of 200 eV to 10 keV.
Archive | 1994
Piero Sferlazzo; Edward Kirby Mcintyre; William Edward Reynolds; Richard Maurice Cloutier; Thomas Neil Horsky
Archive | 1998
Edward Kirby Mcintyre; Kevin Wayne Wenzel; David Richard Swenson; Ernst Frederick Scherer; William F. Divergilio; Kourosh Saadatmand
Archive | 2008
Sami K. Hahto; Richard Goldberg; Edward Kirby Mcintyre; Thomas Neil Horsky
Archive | 1992
Edward Kirby Mcintyre; Victor Maurice Benveniste; Walter Hrynyk
Archive | 1991
Victor Maurice Benveniste; Edward Kirby Mcintyre
Archive | 2000
Kourosh Saadatmand; Michael Anthony Graf; Edward Kirby Mcintyre
Archive | 2008
Kevin S. Cook; Dennis Manning; Edward Kirby Mcintyre; Richard Goldberg
Archive | 2001
Kourosh Saadatmand; Michael Anthony Graf; Edward Kirby Mcintyre
Archive | 1995
Piero Sferlazzo; Edward Kirby Mcintyre; William Edward Reynolds; Richard Maurice Cloutier; Thomas Neil Horsky
