Edward Myers

Comparative advantages of mechanical biosensors

Mechanical interactions are fundamental to biology. Mechanical forces of chemical origin determine motility and adhesion on the cellular scale, and govern transport and affinity on the molecular scale. Biological sensing in the mechanical domain provides unique opportunities to measure forces, displacements and mass changes from cellular and subcellular processes. Nanomechanical systems are particularly well matched in size with molecular interactions, and provide a basis for biological probes with single-molecule sensitivity. Here we review micro- and nanoscale biosensors, with a particular focus on fast mechanical biosensing in fluid by mass- and force-based methods, and the challenges presented by non-specific interactions. We explain the general issues that will be critical to the success of any type of next-generation mechanical biosensor, such as the need to improve intrinsic device performance, fabrication reproducibility and system integration. We also discuss the need for a greater understanding of analyte-sensor interactions on the nanoscale and of stochastic processes in the sensing environment.

Nanoelectromechanical Resonator Arrays for Ultrafast, Gas-Phase Chromatographic Chemical Analysis

Miniaturized gas chromatography (GC) systems can provide fast, quantitative analysis of chemical vapors in an ultrasmall package. We describe a chemical sensor technology based on resonant nanoelectromechanical systems (NEMS) mass detectors that provides the speed, sensitivity, specificity, and size required by the microscale GC paradigm. Such NEMS sensors have demonstrated detection of subparts per billion (ppb) concentrations of a phosphonate analyte. By combining two channels of NEMS detection with an ultrafast GC front-end, chromatographic analysis of 13 chemicals was performed within a 5 s time window.

Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications

We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period.

Sensitive detection of nanomechanical motion using piezoresistive signal downmixing

We have developed a method of measuring rf-range resonance properties of nanoelectromechanical systems (NEMS) with integrated piezoresistive strain detectors serving as signal downmixers. The technique takes advantage of the high strain sensitivity of semiconductor-based piezoresistors, while overcoming the problem of rf signal attenuation due to a high source impedance. Our technique also greatly reduces the effect of the cross-talk between the detector and actuator circuits. We achieve thermomechanical noise detection of cantilever resonance modes up to 71 MHz at room temperature, demonstrating that downmixed piezoresistive signal detection is a viable high-sensitivity method of displacement detection in high-frequency NEMS.

Nanomechanical Torsional Resonators for Frequency-Shift Infrared Thermal Sensing

We investigate use of nanomechanical torsional resonators for frequency-shift-based infrared (IR) thermal sensing. Nanoscale torsion rods, ~1 μm long and 50-100 nm in diameter, provide both extraordinary thermal isolation and excellent angular displacement and torque sensitivities, of order ~10(-7) rad·Hz(-1/2) and ~10(-22) (N·m) Hz(-1/2), respectively. Furthermore, these nanorods act as linear torsional springs, yielding a maximum angular displacement of 3.6° and a dynamic range of over 100 dB; this exceeds the performance of flexural modes by as much as 5 orders of magnitude. These attributes lead to superior noise performance for torsional-mode sensing. We demonstrate the operational principles of torsional-mode IR detection, attaining an uncooled noise equivalent temperature difference (NETD) of 390 mK. By modeling the fundamental noise processes, we project that further reduction of device size can significantly improve thermal responsivity; a room-temperature NETD below 10 mK appears feasible.

Nanomechanical Measurement of Magnetostriction and Magnetic Anisotropy in (Ga,Mn)As

A GaMnAs nanoelectromechanical resonator is used to obtain the first measurement of magnetostriction in a dilute magnetic semiconductor. Resonance frequency shifts induced by field-dependent magnetoelastic stress are used to simultaneously map the magnetostriction and magnetic anisotropy constants over a wide range of temperatures. Owing to the central role of carriers in controlling ferromagnetic interactions in this material, the results appear to provide insight into a unique form of magnetoelastic behavior mediated by holes.

High-speed two-dimensional gas chromatography using microfabricated GC columns combined with nanoelectromechanical mass sensors

We report here for the first time the combination of microfabricated gas chromatography (GC) columns with pneumatic modulation to achieve high-speed comprehensive two-dimensional gas chromatography (GCxGC) using microfabricated components. The GCxGC system is in turn combined with nanoelectromechanical (NEMS) resonator mass sensors that have been coated with a chemically-selective polymer to enhance detection of phosphonate compounds that are useful surrogates for chemical warfare agents (CWA). GC elution peak widths on the order of 20 msec have been achieved. Retention times on the order of 2–4 seconds have been demonstrated for polar compounds, indicating that this microfabricated GCxGC system can be applied for rapid analyses.