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Egon Bussmann

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Publication

Featured researches published by Egon Bussmann.

Archive | 1976

Process control system for the automatic analysis and regeneration of galvanic baths

Egon Bussmann; Bruno Flamme; Jacky Vanhumbeeck; Johannes Helder; Hubert De Steur

Archive | 1974

Process for the automatic checking and control of etching machines

Egon Bussmann; Walter Pritzl

Microelectronics Reliability | 1986

Preventing lateral oxide growth by first forming nitride layer followed by a composite masking layer

Egon Bussmann

Archive | 1976

Process control circuit for metal-depositing baths

Hubert De Steur; Wolfgang Dr Pernegger; Egon Bussmann

Archive | 1991

Microwave energy stimulated plasma discharge to purify semiconductor wafers - by prodn. of excited intermediates from halogen(s) and noble gases which react with impurities, forming volatile cpds.

Heinz Steinhardt; Konrad Dipl Phys Dr Hieber; Egon Bussmann

Archive | 1979

Electronic programme control

Egon Bussmann; Bruno Flamme

Archive | 1984

Prevention of the diffusion of oxidation means during the manufacturing of semiconductor devices

Egon Bussmann

Archive | 1976

Symmetrical reflector lighting system - has reflector rotation symmetrical to optical axis with light source located on axis

Ruprecht Von Dipl Phys Siemens; Egon Bussmann; Bruno Flamme

Archive | 1975

Prozessteuerschaltung fuer metallabscheidende baeder Process control circuit for metallabscheidende baeder

Steur Hubert De; Wolfgang Dr Pernegger; Egon Bussmann

Archive | 1973

Verfahren zur automatischen kontrolle und regelung von aetzmaschinen Method for the automatic control and regulation of Etching

Walter Pritzl; Egon Bussmann

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Collaboration

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Bruno Flamme

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Walter Pritzl

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Hubert De Steur

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Wolfgang Dr Pernegger

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Heinz Steinhardt

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Jacky Vanhumbeeck

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Johannes Helder

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Konrad Dipl Phys Dr Hieber

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