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Heinz Steinhardt

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Publication

Featured researches published by Heinz Steinhardt.

Archive | 1991

Plasma etching in-situ cleaning process for vacuum deposition chambers - with separate plasma discharge excitation of etch gas and admission of activated etch gas to chamber

Heinz Steinhardt; Oswald Spindler; Hans Raske; Josef Mathuni

Archive | 1992

Method for generating excited neutral particles for etching and deposition processes in semiconductor technology with a plasma discharge fed by microwave energy

Heinz Steinhardt; Josef Mathuni

Archive | 2000

Device to generate excited/ionized particles in a plasma

Heinz Steinhardt; Alexander Gschwandtner; Josef Mathuni

Archive | 1991

Microwave energy stimulated plasma discharge to purify semiconductor wafers - by prodn. of excited intermediates from halogen(s) and noble gases which react with impurities, forming volatile cpds.

Heinz Steinhardt; Konrad Dipl Phys Dr Hieber; Egon Bussmann

Archive | 2005

Vorrichtung zur Erzeugung angeregter und/oder ionisierter Teilchen in einem Plasma und Verfahren zur Erzeugung ionisierter Teilchen

Alexander Gschwandtner; Josef Mathuni; Alexander Mattheus; Stephan Schneider; Jürgen Sellmaier; Heinz Steinhardt

Archive | 1991

Plasma etching with microwave pre-excitation of the etching gas for mfr. of integrated semiconductor circuits - involves using excited, electrically neutral gas particles which are produced by plasma discharge and enter an etching reactor

Josef Dipl Phys Dr Mathuni; Heinz Steinhardt

Archive | 1999

Device for producing excited/ionized particles in a plasma

Heinz Steinhardt; Josef Mathuni; Alexander Gschwandtner

Archive | 2006

Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles

Alexander Gschwandtner; Josef Mathuni; Alexander Mattheus; Stephan Schneider; Jürgen Sellmaier; Heinz Steinhardt

Archive | 2004

Device for producing excited and/or ionised particles in a plasma and method for producing ionised particles

Alexander Gschwandtner; Josef Mathuni; Alexander Mattheus; Stephan Schneider; Juergen Sellmaier; Heinz Steinhardt

Archive | 2003

Vorrichtung zur Erzeugung angeregter und/oder ionisierter Teilchen in einem Plasma und Verfahren zur Erzeugung ionisierter Teilchen An apparatus for generating excited and / or ionized particles in a plasma and method for generating ionized particles

Alexander Gschwandtner; Josef Mathuni; Alexander Mattheus; Stephan Schneider; Jürgen Sellmaier; Heinz Steinhardt

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Josef Mathuni

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Alexander Gschwandtner

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Alexander Mattheus

Infineon Technologies

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Josef Dipl Phys Dr Mathuni

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Hans Raske

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Oswald Spindler

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Egon Bussmann

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Konrad Dipl Phys Dr Hieber

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