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Dive into the research topics where Eleonora Ferraris is active.

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Featured researches published by Eleonora Ferraris.


EuroSime 2006 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems | 2006

Application of an Innovative Method for the Fatigue Characterisation of 15 μm Thick Epitaxial Polysilicon

Eleonora Ferraris; Irene Fassi; M. Del Sarto

The present work deals with the application of a new method for the on-chip fatigue characterization of micro electromechanical systems. The method is based on the fact that the 2nd harmonic of comb actuated system is proportional to the driving velocity; thus an indirect monitoring of the system displacement is possible and the sample breaking can be registered by electrical measurements. The method has been applied for characterising the industrial material used by STMicroelectronics: a 15 mum thick epitaxial polysilicon and the experimental results have been compared to the literature data. In particular, the computed relative strength reduction to the cycles to failure follow the same trend derived in different loading conditions of frequency, thus confirming a not time depending failure mechanism


international conference on mems, nano, and smart systems | 2005

Polysilicon fatigue test-bed monitoring based on the 2nd harmonic of the device current measurement

Eleonora Ferraris; Irene Fassi; B. De Masi; Marco Del Sarto


International Conference on Advances in Materials and Processing Technologies | 2010

Fabrication Of Micro-Nozzles Via µ-EDM Process

Francesco Modica; Eleonora Ferraris; Gianluca Trotta; Irene Fassi; Dominiek Reynaerts


symposium on design test integration and packaging of mems moems | 2006

A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices

Eleonora Ferraris; Irene Fassi; Biagio De Masi; R. Rosing; Andrew Richardson


symposium on design, test, integration and packaging of mems/moems | 2005

A capacitance and optical method for the static and dynamic characterisation of MEMS devices

Eleonora Ferraris; Irene Fassi; Biagio De Masi; R. Rosing; Andrew Richardson


MicroMechanics EuropeWorkshop | 2005

Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures

Eleonora Ferraris; Marco Dona; Andrea Cataldo; Irene Fassi; Biagio De Masi; Marco Del Sarto


Sensor Letters | 2008

Fatigue Life Investigation of the 15 μ m Thick ThELMA ™ Epitaxial Polysilicon

Eleonora Ferraris; Irene Fassi; Marco Del Sarto


Euroasia Semiconductor | 2007

Static and Dynamic MEMS device characterisation

Eleonora Ferraris; Irene Fassi; Biagio De Masi; R. Rosing; Andrew Richardson


Advanced Mechatronic Systems Workshop | 2005

Development of a mini-robot based on parallel kinematic architecture

Eleonora Ferraris; Franco Sommariva; Fabio Biganzoli; Dario Dallefrate; Irene Fassi


international symposium on robotics | 2004

Design of a multi Dof microdevice based on Parallel Kinematics

Irene Fassi; Eleonora Ferraris; Giovanni Legnani

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Irene Fassi

National Research Council

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Claudia Pagano

National Research Council

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Gianluca Trotta

National Research Council

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M. Del Sarto

National Research Council

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Dominiek Reynaerts

Katholieke Universiteit Leuven

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