Elfido Coss

Data requirements and communication issues for advanced process control

Data streams and communication issues are the most critical areas for successful advanced process control (APC) programs. These areas are vital for both APC run-to-run controllers and fault detection and classification (FDC) systems used for high volume manufacturing applications in the semiconductor industry. All APC systems rely on data streams to make their process changes, to keep the process on target and in control, and to otherwise signal a need for engineering involvement to make similar corrective actions. The access to, communication of, and reliability and integrity of these data streams are essential to all APC programs. APC run-to-run controllers use the data to make changes in the process. FDC systems focus on predicting pending equipment- or process- related problems or detecting them quickly when they occur. The inability to access the needed data stream can prohibit the use of APC run-to-run controllers or FDC systems on critical process operations. Worse yet, the use of unreliable or cor...