Sam H. Allen

Method and apparatus for proactive dispatch system to improve line balancing

System for brokering fault detection data

Broadband distribution of SECS-II data

Method and apparatus for controlling a multi-chamber processing tool

Routing workpieces based upon detecting a fault

Method for determining, tracking and/or controlling processing based upon silicon characteristics

System for sorting multiple semiconductor wafers

Wafer rotation randomization for process defect detection in semiconductor fabrication

Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same

Determining a possible cause of a fault in a semiconductor fabrication process