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Engelhardt Manfred

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Publication

Featured researches published by Engelhardt Manfred.

Archive | 1998

Verfahren zum Strukturieren eines Substrats

Weinrich Volker; Engelhardt Manfred; Kreupl Franz; Schiele Manuela; Saenger Annette; Hartner Walter

Archive | 2007

VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERSPEICHERBAUELEMENTS

Engelhardt Manfred; Weinrich Volker; Kreupl Franz; Schiele Manuela

Archive | 2002

HOLLOW STRUCTURE IN AN INTEGRATED CIRCUIT, MULTIPLE-CAVITY STRUCTURE IN AN INTEGRATED CIRCUIT, AND METHOD FOR PRODUCING A HOLLOW STRUCTURE IN AN INTEGRATED CIRCUIT

Pamler Werner; Engelhardt Manfred; Gabric Zvonimir

Archive | 2000

Verfahren zum Strukturieren einer Schicht

Weinrich Volker; Engelhardt Manfred; Diener Walter

Archive | 2004

Structure forming method

Engelhardt Manfred; Weinrich Volker

Archive | 2001

Method for fabricating an integrated circuit having at least one metallization plane

Schwarzl Siegfried; Engelhardt Manfred; Kreupl Franz

Archive | 2000

Surface material removal, especially for hard mask removal from a semiconductor surface, comprises removing material while protecting the rest of the surface with a temporary layer

Engelhardt Manfred; Weinrich Volker

Archive | 2003

Cavity structure, multiple cavity structure and method for fabricating a cavity structure

Pamler Werner; Engelhardt Manfred; Gabric Zvonimir

Archive | 2002

Semiconductor electronic device, method for producing a conductive connection in a semiconductor electronic device, and method for producing a semiconductor electronic device

Hoenlein Wolfgang; Engelhardt Manfred; Kreupl Franz

Archive | 2002

Method to manufacture semiconductor memory components

Engelhardt Manfred; Weinrich Volker; Kreupl Franz; Schiele Manuela

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Collaboration

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Weinrich Volker

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Kreupl Franz

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Pamler Werner

Infineon Technologies

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Schiele Manuela

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Gabric Zvonimir

Infineon Technologies

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Bruchhaus Rainer

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Diener Walter

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Frank Hintermaier

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Hartner Walter

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Hoenlein Wolfgang

Infineon Technologies

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