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Dive into the research topics where Frank Hintermaier is active.

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Featured researches published by Frank Hintermaier.


MRS Proceedings | 1999

Effect of Film Composition on Low Temperature Processing of SBT Deposited by MOCVD

Harald Bachhofer; Frank Hintermaier; Manfred Hauf; Oswald Spindler; Thomas Haneder; Christine Dehm; Henning Von Philipsborn; Rainer Waser

Bi-layered ferroelectric strontium bismuth tantalate (SBT) thin films of various film compositions were deposited on Pt/Ti/SiO 2 /Si substrates by metalorganic chemical vapor deposition (MOCVD) and crystallized at 700°C in oxygen ambient. Phase transition, orientation, second phases and remanent polarization were investigated with respect to film stoichiometry. X-ray diffraction (XRD) measurements revealed that excess Bi lowers the transition temperature from fluorite-type to ferroelectric phase. However, SBT films with Bi-excess of 15% or higher exhibit pronounced Bi-loss during crystallization and a decrease in the relative intensity of the (200) peak. Highly Sr-deficient films are not fully crystallized but support pyrochlore formation. The maximum remanent polarization is obtained at a Sr-deficiency of 15–25% and a Bi-excess of 10% (0.85/2.20/2.00).


Archive | 1997

Method for the selective deposition of bismuth based ferroelectric thin films by chemical vapor deposition

Frank Hintermaier; Bryan C. Hendrix; Jeff Roeder; Peter Van Buskirk; Thomas H. Baum


Archive | 1998

Low temperature CVD processes for preparing ferroelectric films using Bi carboxylates

Frank Hintermaier; Peter C. Van Buskirk; Jeffrey F. Roeder; Bryan C. Hendrix; Thomas H. Baum; Debra A. Desrochers


Archive | 1998

Amorphously deposited metal oxide ceramic films

Frank Hintermaier; Bryan C. Hendrix; Jeffrey F. Roeder; Debra A. Desrochers; Thomas H. Baum


Archive | 2004

Method of controlled chemical vapor deposition of a metal oxide ceramic layer

Frank Hintermaier


Archive | 2001

Method for liquid delivery CVD utilizing alkane and polyamine solvent compositions

Frank Hintermaier; Thomas H. Baum


Archive | 2001

Ferroelectric random access memory (FeRAM) having storage capacitors with different coercive voltages

Walter Hartner; Günther Schindler; Frank Hintermaier


Archive | 1998

Reduced degradation of metal oxide ceramic due to diffusion of a mobile specie therefrom

Frank Hintermaier; Jeffrey F. Roeder; Bryan C. Hendrix; Debra A. Desrochers; Thomas H. Baum


Archive | 2001

Method for preventing etching-induced damage to a metal oxide film by patterning the film after a nucleation anneal but while still amorphous and then thermally annealing to crystallize

Walter Hartner; Günther Schindler; Frank Hintermaier; Volker Weinrich


Archive | 1999

Reduced diffusion of a mobile specie from a metal oxide ceramic

Frank Hintermaier

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