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Eric Hermanson

Varian Semiconductor

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Publication

Featured researches published by Eric Hermanson.

Archive | 2006

Methods and apparatus for ion beam angle measurement in two dimensions

James J. Cummings; Joseph C. Olson; Arthur H. Clough; Eric Hermanson; Rosario Mollica; Paul J. Murphy; Mark Donahue

Archive | 2002

Adjustable conductance limiting aperture for ion implanters

Jay T. Scheuer; Anthony Renau; Eric Hermanson

Archive | 2005

Electron injection in ion implanter magnets

Anthony Renau; Donna L. Smatlak; James Buff; Eric Hermanson

Archive | 2006

Insulator system for a terminal structure of an ion implantation system

Russell J. Low; Piotr R. Lubicki; D. Jeffrey Lischer; Stephen E. Krause; Eric Hermanson; Joseph C. Olson

Archive | 2005

Ion beam neutral detection

Anthony Renau; Joseph C. Olson; Eric Hermanson; Gordon Angel

Archive | 2008

TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER

Russell J. Low; Piotr R. Lubicki; Jeffrey D. Lischer; Stephen E. Krause; Eric Hermanson; Joseph C. Olson; Kasegn D. Tekletsadik

Archive | 2007

Terminal structures of an ion implanter having insulated conductors with dielectric fins

Kasegn D. Tekletsadik; Eric Hermanson; Douglas E. May; Stephen E. Krause; Russell J. Low

Archive | 2007

Power supply for an ion implantation system

Piotr R. Lubicki; Russell J. Low; Stephen E. Krause; Eric Hermanson

Archive | 2006

Ion beam measurement apparatus and method

Anthony Renau; Eric Hermanson; Joseph C. Olson; Gordon Angel

Archive | 2006

TECHNIQUES FOR PREVENTING PARASITIC BEAMLETS FROM AFFECTING ION IMPLANTATION

Russell J. Low; Jonathan Gerald England; Stephen E. Krause; Eric Hermanson

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Collaboration

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Russell J. Low

Varian Semiconductor

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Stephen E. Krause

Varian Semiconductor

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Kasegn D. Tekletsadik

Varian Semiconductor

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Joseph C. Olson

Varian Semiconductor

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Piotr R. Lubicki

Varian Semiconductor

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Anthony Renau

Varian Semiconductor

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Robert J. Mitchell

Varian Semiconductor

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D. Jeffrey Lischer

Varian Semiconductor

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Douglas E. May

Varian Semiconductor

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Frank Sinclair

Varian Semiconductor

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