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D. Jeffrey Lischer

Varian Semiconductor

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Publication

Featured researches published by D. Jeffrey Lischer.

Archive | 2006

Insulator system for a terminal structure of an ion implantation system

Russell J. Low; Piotr R. Lubicki; D. Jeffrey Lischer; Stephen E. Krause; Eric Hermanson; Joseph C. Olson

Archive | 2008

EMBOSSED ELECTROSTATIC CHUCK

D. Jeffrey Lischer; Dale K. Stone; Lyudmila Stone; David E. Suuronen; Julian G. Blake

Archive | 2010

TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRANSPARENCY ELECTRODES

James Buff; Svetlana Radovanov; Bon-Woong Koo; Wilhelm P. Platow; Frank Sinclair; D. Jeffrey Lischer; Craig R. Chaney; Steven C. Borichevsky; Eric R. Cobb; Mayur Jagtap; Kenneth H. Purser; Victor M. Benveniste; Shardul Patel

Archive | 2014

Dynamic heating method and system for wafer processing

Morgan D. Evans; Kevin Anglin; D. Jeffrey Lischer; William T. Weaver; Jason M. Schaller; Robert Brent Vopat

Archive | 2016

Substrate handling and heating system

Morgan D. Evans; Jason M. Schaller; D. Jeffrey Lischer; Ala Moradian; William T. Weaver; Robert Brent Vopat

Archive | 2016

Hybrid Thermal Electrostatic Clamp

Morgan D. Evans; Jason M. Schaller; Ala Moradian; D. Jeffrey Lischer; Gregory D. Thronson

Archive | 2007

Interfacing two insulation parts in high voltage environment

Russell J. Low; Kasegn D. Tekletsadik; Anthony Renau; Piotr R. Lubicki; D. Jeffrey Lischer; Steve Krause; Eric Hermanson; Doug E. May

Archive | 2016

Apparatus for heating and processing a substrate

Morgan D. Evans; Jason M. Schaller; D. Jeffrey Lischer; Ala Moradian

Archive | 2016

Apparatus for improving temperature uniformity of a workpiece

Dawei Sun; D. Jeffrey Lischer; Steven M. Anella; Dale Keith Stone; Lyudmila Stone

Archive | 2011

Current lead with a configuration to reduce heat load transfer in an alternating electrical current environment

Gregory Citver; Frank Sinclair; D. Jeffrey Lischer; Nandishkumar Desai

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Collaboration

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Jason M. Schaller

Varian Semiconductor

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Morgan D. Evans

Varian Semiconductor

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Ala Moradian

Varian Semiconductor

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Frank Sinclair

Applied Materials

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Craig R. Chaney

Varian Semiconductor

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Dale K. Stone

Varian Semiconductor

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Eric Hermanson

Varian Semiconductor

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Eric R. Cobb

Varian Semiconductor

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James Buff

Varian Semiconductor

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Julian G. Blake

Varian Semiconductor

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