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Dive into the research topics where Erwan Godot is active.

Publication


Featured researches published by Erwan Godot.


Archive | 2005

Vacuum interface between a mini-environment pod and a piece of equipment

Catherine Le Guet; Jean-Pierre Desbiolles; Hisanori Kambara; Erwan Godot; Raphaël Sylvestre


Archive | 2008

METHOD FOR TREATING A TRANSPORT SUPPORT FOR THE CONVEYANCE AND ATMOSPHERIC STORAGE OF SEMICONDUCTOR SUBSTRATES, AND TREATMENT STATION FOR THE IMP LEMENTATION OF SUCH A METHOD

Erwan Godot; Rémi Thollot; Amaud Favre


Archive | 2007

Device for the transport, storage, and transfer of substrates

Raphaël Sylvestre; Erwan Godot; Gloria Sogan


Archive | 2008

Method of treating a transport support for the atmospheric storage and conveyance of semiconductor substrates, and treatment station for the implementation of such a method

Erwan Godot; Rémi Thollot; Arnaud Favre


Archive | 2008

Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a method

Erwan Godot; Rémi Thollot; Amaud Favre


Archive | 2010

Device and method for analysing gas and associated measurement station

Arnaud Favre; Erwan Godot; Bertrand Bellet


Archive | 2009

Station and method for measuring the contamination of an enclosure used for transporting semiconductor substrates

Arnaud Favre; Erwan Godot; Bertrand Bellet


Archive | 2008

TRANSPORT POD INTERFACE

Erwan Godot


Archive | 2011

Treatment device for transport and storage boxes

Sylvain Rioufrays; Erwan Godot; Arnaud Favre


Archive | 2011

System for sampling and analysing gas

Jean-Marie Foray; Erwan Godot

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