F. F. Komarov

Influence of Parameters of Reactive Magnetron Sputtering on Tribomechanical Properties of Protective Nanostructured Ti–Al–N Coatings

The influence of substrate temperature and bias voltage on the structure and tribomechanical properties of the Ti–Al–N coatings obtained by reactive magnetron sputtering technique has been investigated. The structure and elemental and phase compositions have been studied by scanning electron microscopy, Rutherford backscattering, and X-Ray diffraction. The results of friction and wear experiments indicated that the lowest coefficient of friction (three times lower than 12Cr18Ni10Ti) corresponded to a coating deposited at a bias voltage of–200 V and a substrate temperature of 340°С, while the most wear-resistant coating (under a load of 700 mN and the testing time of 1080 s) was Ti–Al–N sputtered at a bias voltage of–200 V and a substrate temperature of 440°С.

Ion-Beam Synthesis of InSb Nanocrystals in Si Matrix

The results of structural and optical investigation of crystalline Si with embedded InSb nanocrystals are reported. These nanocrystals were synthesized in silicon matrix by means of high-fluence “hot” implantation of Sb and In ions followed by thermal treatment. TEM gives an evidence of nanocrystal formation in implanted and annealed samples as well as an existence of microtwins and dislocation-type defects and substantial residual mechanical strains. We have identified nanocrystals as InSb from RS data. Mechanical strains in “silicon – InSb nanocrystals” system have been evaluated, too.