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Fangli Hao

Lam Research

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Publication

Featured researches published by Fangli Hao.

Archive | 1999

Gas distribution apparatus for semiconductor processing

Rajinder Dhindsa; Fangli Hao; Eric Lenz

Archive | 1999

Reaction chamber component having improved temperature uniformity

Fangli Hao; Rajinder Dhindsa; Javad Pourhashemi

Archive | 2001

Linear drive system for use in a plasma processing system

Fangli Hao; Keith E. Dawson; Eric Lenz

Archive | 2002

Lower electrode design for higher uniformity

Fangli Hao; Albert R. Ellingboe; Eric Lenz

Archive | 2001

Wafer area pressure control

Fangli Hao; Eric Lenz; Bruno Morel

Archive | 2005

Deformation reduction at the main chamber

Eric Lenz; Albert R. Ellingboe; Fangli Hao

Archive | 2001

Drucksteuerung in der Umgebung eines Wafers Pressure control in the environment of a wafer

Fangli Hao; Eric Lenz; Bruno Morel

Archive | 2001

Lineare antriebsvorrichtung zur anwendung in einer plasmabehandlungsvorrichtung Linear drive device for use in a plasma treating apparatus

Fangli Hao; Keith Dawson

Archive | 2001

Systeme d'entrainement lineaire utilise dans un systeme de traitement du plasma

Fangli Hao; Keith Dawson

Archive | 2000

Ensemble a electrode

Fangli Hao; Albert R. Ellingboe; Eric Lenz

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Eric Lenz

Lam Research

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Albert R. Ellingboe

Lam Research

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Rajinder Dhindsa

Lam Research

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Bruno Morel

Lam Research

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Javad Pourhashemi

Lam Research

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Keith E. Dawson

Lam Research

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