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Bruno Morel

Lam Research

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Publication

Featured researches published by Bruno Morel.

Archive | 2005

Methods for wet cleaning quartz surfaces of components for plasma processing chambers

Hong Shih; Tuochuan Huang; Duane Outka; Jack Kuo; Shenjian Liu; Bruno Morel; Anthony Chen

Archive | 2004

WET CLEANING OF ELECTROSTATIC CHUCKS

Hong Shih; Tuochuan Huang; Catherine Zhou; Bruno Morel; Brian Mcmillin; Paul Mulgrew; Armen Avoyan

Archive | 2001

Wafer area pressure control

Fangli Hao; Eric Lenz; Bruno Morel

Archive | 2004

Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control

Rodney Kistler; David Hemker; Yehiel Gotkis; Aleksander Owczarz; Bruno Morel; Damon Vincent Williams

Archive | 2010

Bare aluminum baffles for resist stripping chambers

Fred Dennis Egley; Michael S. Kang; Anthony Chen; Jack Kuo; Hong Shih; Duane Outka; Bruno Morel

Archive | 2004

Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system

Hong Shih; Anthony Chen; Sok Kiow Tan; Stephen Hwang; John Daugherty; Bruno Morel

Archive | 2003

Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control

Rodney Kistler; David Hemker; Yehiel Gotkis; Aleksander Owczarz; Bruno Morel; Damon Vincent Williams

Archive | 2000

Integrated load simulator

Albert R. Ellingboe; Bruno Morel

Archive | 2005

Nettoyage par voie humide pour mandrins electrostatiques

Hong Shih; Tuochuan Huang; Catherine Zhou; Bruno Morel; Brian Mcmillin; Paul Mulgrew; Armen Avoyan

Archive | 2005

Verfahren zur nassreinigung von quarzflächen von komponenten für plasmabearbeitungskammern

Hong Shih; Tuochuan Huang; Duane Outka; Jack Kuo; Shenjian Liu; Bruno Morel; Anthony Chen

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Hong Shih

Lam Research

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Anthony Chen

Lam Research

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Tuochuan Huang

Lam Research

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Armen Avoyan

Lam Research

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Brian Mcmillin

Lam Research

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Catherine Zhou

Lam Research

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Duane Outka

Lam Research

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Jack Kuo

Lam Research

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Paul Mulgrew

Lam Research

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Aleksander Owczarz

Lam Research

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