Farid Abooameri | Researchain

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Featured researches published by Farid Abooameri.

Archive | 2006

Apparatus for etching high aspect ratio features

Sharma Pamarthy; Huutri Dao; Xiaoping Zhou; Kelly A. Mcdonough; Jivko Dinev; Farid Abooameri; David E. Gutierrez; Jim Zhongyi He; Robert Scott Clark; Dennis Koosau; Jeffrey William Dietz; Declan Scanlan; Subhash Deshmukh; John Holland; Alexander Paterson

Archive | 2009

Etch reactor suitable for etching high aspect ratio features

Manfred Oswald; Jivko Dinev; Jan Rupf; Markus Meye; Francesco Maletta; Uwe Leucke; Ron Tilger; Farid Abooameri; Alexander Matyushkin; Denis M. Koosau; Xiaoping Zhou; Thorsten Lehmann; Declan Scanlan

Archive | 2002

Methods for etching using building blocks

Farid Abooameri; Shashank C. Deshmukh; Meihua Shen; Stephanie S. Cheng; Nicolas Gani; Thorsten Lill

Archive | 2000

Iridium and iridium oxide electrodes used in ferroelectric capacitors

Kaushal K. Singh; Farid Abooameri; Visweswaren Sivaramakrishnan; Talex Sajoto; Vicente Lim; Jun Zhao

Archive | 2007

Vacuum processing chamber suitable for etching high aspect ratio features and components of same

Archive | 2003

Process for etching polysilicon gates with good mask selectivity, critical dimension control, and cleanliness

Songlin Xu; Thorsten Lill; Yeajer Arthur Chen; Mohit Jain; Nicolas Gani; Shing-li Sung; Jitske Kretz; Meihua Shen; Farid Abooameri

Archive | 2001

Organic metal chemical vapor deposition of lead titanate zirconate film

Farid Abooameri; Jun Amano; Vicente Lim; Doug Marston; Laura Wills Mirkarimi; Kaushal K. Singh; Visweswaren Sivaramakrishnan; Christopher P. Wade; Jun Zhao; シヴァラマクリシュナンヴィスウェスワレン; リムヴィセント; ウェイドクリストファー; ケー．シンコーシャル; アマノジュン; ツァオジュン; マーストンダグ; アブーアメリファリッド; ミルカリミローラ

Archive | 2001

MOCVD of lead zirconate titanate films

Christopher P. Wade; Visweswaren Sivaramakrishnan; Kaushal K. Singh; Farid Abooameri; Laura Mirkarimi; Jun Amano; Jun Zhao; Doug Marston; Vicente Lim

Archive | 2000

Iridium and iridium oxide electrodes for ferroelectric capacitor

Farid Abooameri; Vicente Lim; Talex Sajoto; Kausal K Singh; Visweswaren Sivaramakrishnan; Jun Zhao; シヴァラマクリシュナンヴィスウェスワレン; リムヴィセント; キショールシンコーシャル; ツァオジュン; サジョトタレックス; アブーアメリファリッド

Archive | 2013