Visweswaren Sivaramakrishnan

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Visweswaren Sivaramakrishnan is active.

Explore More

Publication

Featured researches published by Visweswaren Sivaramakrishnan.

Archive | 2005

Liquid precursors for the CVD deposition of amorphous carbon films

Martin Jay Seamons; Wendy H. Yeh; Sudha Rathi; Deenesh Padhi; Andy Luan; Sum-Yee Betty Tang; Priya Kulkarni; Visweswaren Sivaramakrishnan; Bok Hoen Kim; Hichem M'Saad; Yuxiang May Wang; Michael Chiu Kwan

Archive | 1996

Chemical vapor deposition reactor system and integrated circuit

Kathleen Russell; Stuardo Robles; Bang C. Nguyen; Visweswaren Sivaramakrishnan

Archive | 1996

Method and apparatus for gettering fluorine from chamber material surfaces

Li-Qun Xia; Visweswaren Sivaramakrishnan; Srinivas D. Nemani; Ellie Yieh; Gary Fong

Archive | 1996

CHAMBER LINER FOR HIGH TEMPERATURE PROCESSING CHAMBER

Jonathan Frankel; Visweswaren Sivaramakrishnan

Archive | 2000

Heater/lift assembly for high temperature processing chamber

Jonathan Frankel; Hari Ponnekanti; Inna Shmurun; Visweswaren Sivaramakrishnan

Archive | 1996

Lid assembly for high temperature processing chamber

Jonathan Frankel; Inna Shmurun; Visweswaren Sivaramakrishnan; Eugene Fukshansky

Archive | 2007

Method for depositing an amorphous carbon film with improved density and step coverage

Deenesh Padhi; Hyoung-Chan Ha; Sudha Rathi; Derek R. Wtty; Chiu Chan; Sohyun Park; Ganesh Balasubramanian; Karthik Janakiraman; Martin Jay Seamons; Visweswaren Sivaramakrishnan; Bok Hoen Kim; Hichem M'Saad

Archive | 1997

Method and apparatus for processing a semiconductor substrate

Gary Fong; Jonathan Frankel; Timothy E. Levine; Srinivas D. Nemani; Inna Shmurun; Irwin Silvestre; Visweswaren Sivaramakrishnan; Li-Qun Xia; Ellie Yieh

Archive | 2004