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Dive into the research topics where Franz Dipl Ing Koeppl is active.

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Featured researches published by Franz Dipl Ing Koeppl.


Archive | 1980

Tri:chloro-silane continuous prodn. from silicon tetra:chloride - by high temp. reaction with hydrogen, then reaction with silicon at lower temp.

Alois Goeppinger; Rudolf Dipl Chem Griesshammer; Michael Dipl Chem Dr Schwab; Franz Dipl Ing Koeppl


Archive | 1976

VERFAHREN ZUR HERSTELLUNG GROSSFLAECHIGER, FREITRAGENDER PLATTEN AUS SILICIUM

Bernhard Dipl Phys Authier; Rudolf Dipl Chem Griesshammer; Franz Dipl Ing Koeppl; Winfried Dipl Chem Dr Lang; Heinz-Joerg Dipl Chem Dr Rath; Erhard Dipl Chem Dr Sirtl


Archive | 1976

Verfahren zur abscheidung von polykristallinem silicium

Franz Dipl Ing Koeppl; Rudolf Dipl Chem Griesshammer; Helmut Hamster; Alois Goeppinger


Archive | 1998

PRELIMINARY TREATMENT FOR PULVERIZING CRYSTAL

Gerhard Ast; Franz Dipl Ing Koeppl; Matthaeus Schantz; Friedrich Steudten; ゲルハルト・アスト; フランツ・ケップル; フリードリッヒ・シュトイテン; マテウス・シャンツ


Archive | 1999

Schwingförderer und Verfahren zur Förderung von Siliciumbruch Vibratory feeders and method for conveying silicon fragments

Dirk Flottmann; Franz Dipl Ing Koeppl; Matthaeus Schantz; Friedrich Steudten


Archive | 1998

Procedure for comminuting brittle material, especially semi-conductor rods, entails directing HP fluid onto rod from HP jets in ring in direct vicinity of angled holder and from HP jets in pressure plate

Axel Frauenknecht; Dirk Flottmann; Franz Dipl Ing Koeppl; Matthaeus Schantz; Friedrich Steudten; Josef Waldinger


Archive | 1998

METHOD AND DEVICE FOR PULVERIZING SEMICONDUCTOR MATERIAL

Franz Dipl Ing Koeppl; Matthaeus Schantz


Archive | 1982

A process for the preparation of silicon obtained in the production exhaust gases

Rudolf Dipl Chem Griesshammer; Franz Dipl Ing Koeppl; Winfried Dipl Chem Dr Lang; Ernst Dipl Chem Dr Muehlhofer; Michael Dipl Chem Dr Schwab


Archive | 1981

Verfahren zur aufarbeitung der bei der siliciumabscheidung und der siliciumtetrachlorid-konvertierung anfallenden restgase Process for working up the case of silicon deposition and silicon tetrachloride-conversion resulting residual gases

Rudolf Dipl Chem Griesshammer; Franz Dipl Ing Koeppl; Helmut Lorenz; Friedrich Steudten


Archive | 1980

Apparatus for high temperature treatment of gases

Helmut Hamster; Franz Dipl Ing Koeppl; Franz Schreieder; Rudolf Dipl Chem Griesshammer

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