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Dive into the research topics where Franz Ungar is active.

Publication


Featured researches published by Franz Ungar.


international interconnect technology conference | 2003

Process optimization-the key to obtain highly reliable Cu interconnects

Armin Fischer; A. von Glasow; S. Penka; Franz Ungar

In this paper, we describe electromigration and stressvoiding mechanism in copper interconnects.


international reliability physics symposium | 2003

The influence of the SiN cap process on the electromigration and stressvoiding performance of dual damascene Cu interconnects

A. von Glasow; Armin Fischer; D. Bunel; G. Friese; A. Hausmann; O. Heitzsch; Martina Hommel; J. Kriz; S. Penka; P. Raffin; C. Robin; H.-P. Sperlich; Franz Ungar; A.E. Zitzelsberger


Archive | 2008

Electrical Device and Fabrication Method

Christian Russ; Gunther Lehmann; Franz Ungar


international interconnect technology conference | 2002

Electromigration failure mechanism studies on copper interconnects

Armin Fischer; A. von Glasow; S. Penka; Franz Ungar


Archive | 2004

Semiconductor chip with FIB protection

Franz Ungar; Günter Schmid


Archive | 2003

Set of integrated capacitor arrangements, especially integrated grid capacitors

Armin Fischer; Franz Ungar


Archive | 2015

Fuses und Fuse-Programmierverfahren

Armin Fischer; Gunther Lehmann; Sascha Siegler; Franz Ungar; Alexander von Glasow


Archive | 2015

Fuses and fuse programming methods

Franz Ungar; Gunther Lehmann; Armin Fischer; Alexander von Glasow; Sascha Siegler


Archive | 2009

Elektrische Vorrichtung und Herstellungsverfahren Electric device and manufacturing method

Gunther Dr. Lehmann; Christian Russ; Franz Ungar


Archive | 2009

An electric device and manufacturing method

Gunther Dr. Lehmann; Christian Russ; Franz Ungar

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D. Bunel

Infineon Technologies

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