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Dive into the research topics where Frey Wilhelm is active.

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Featured researches published by Frey Wilhelm.


Archive | 2008

Verfahren zur Herstellung dünner Schichten, insbesondere Dünnschichtsolarzellen, auf einem Trägersubstrat

Artmann Hans; Frey Wilhelm; Moellendorf Manfred


Archive | 2003

Verfahren zur Herstellung beidseitig oxidierter Siliziumwafer

Laermer Franz; Frey Wilhelm; Artmann Hans


Archive | 2006

Herstellung von porösem Silicium

Artmann Hans; Frey Wilhelm; Laermer Franz


Archive | 2000

Leveling sensor for e.g. aligning laser device has acceleration measurement unit enclosed along with acceleration sensor via common frame

Frey Wilhelm; Laermer Franz; Neumann Juergen


Archive | 1999

Micro-tool, especially a micro-gripper for precise positioning of e.g. micro-lenses in micro-optical system assembly, has a gripper arm acceleration mechanism for overcoming adhesive force between a held component and a gripping face

Funk Karsten; Frey Wilhelm


Archive | 2001

Production of a porous silicon surface for making thin layer solar cells involves passing silicon strip through electrolyte bath

Artmann Hans; Frey Wilhelm; Laermer Franz


Archive | 2000

Verfahren zur Herstellung einer defektarmen, einkristallinen Silizium-Carbid-Schicht

Heyers Klaus; Frey Wilhelm


Archive | 2010

Verfahren zur Herstellung von Hochdrucksensoren

Henning Frank; Frey Wilhelm


Archive | 2005

Integrated microsystem manufacturing method e.g. for resonator, acceleration sensor or rotation rate sensor, has substrate provided with first function layer and structured mechanical function layer in succession

Frey Wilhelm; Kronmueller Silvia; Duenn Christoph; Yama Gary; Zoellin Jochen


Archive | 2004

Verfahren zur Herstellung integrierter Mikrosysteme

Frey Wilhelm; Laermer Franz; Duenn Christoph

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