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Laermer Franz

Bosch

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Publication

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Archive | 2001

SENSOR WITH AT LEAST ONE MICROMECHANCAL STRUCTURE AND METHOD FOR THE PRODUCTION THEREOF

Reichenbach Frank; Pinter Stefan; Henning Frank; Artmann Hans; Baumann Helmut; Laermer Franz; Offenberg Michael; Bischopink Georg

Archive | 1998

Method of processing silicon

Schilp Andrea; Benz Gerhard; Muenzel Horst; Laermer Franz

Archive | 2000

Encapsulation of metallic microcomponents on analyzing circuit on substrate wafer, e.g. for car, machine control and consumer purposes, has protective coating on circuit covered by bonding medium on cap wafer

Pinter Stefan; Hirtreiter Josef; Baumann Helmut; Fehrenbach Michael; Laermer Franz; Elsner Bernhard

Archive | 1999

Vorrichtung und Verfahren zum Hochratenätzen eines Substrates mit einer Plasmaätzanlage und Vorrichtung und Verfahren zum Zünden eines Plasmas und Hochregeln oder Pulsen der Plasmaleistung

Becker Volker; Laermer Franz; Schilp Andrea; Beck Thomas

Archive | 2006

Integriertes Spreng- oder Zündelement und dessen Verwendung

Rudhard Joachim; Artmann Hans; Pannek Thorsten; Laermer Franz; Heyers Klaus; Nagel Sabine

Archive | 2003

Verfahren zur Herstellung beidseitig oxidierter Siliziumwafer

Laermer Franz; Frey Wilhelm; Artmann Hans

Archive | 2002

Micro-component used as a sensor element comprises a glass body provided with an electrically conducting coating on its side facing a microstructure

Laermer Franz

Archive | 2007

ANISOTROPIC ETCHING METHOD FOR SILICON

Laermer Franz; Schilp Andrea

Archive | 2000

VERFAHREN ZUM ANISOTROPEN PLASMAÄTZEN VON HALBLEITERN

Laermer Franz; Schilp Andrea

Archive | 2004

Verfahren zur Erzeugung einer SOI-Struktur mit einer Isolationsschicht auf einem Siliziumwafer und einer darauf epitaktisch aufgebrachten Siliziumschicht

Laermer Franz; Schilp Andrea

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Schilp Andrea

Bosch

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Frey Wilhelm

Bosch

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Artmann Hans

Bosch

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Becker Volker

Bosch

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Breitschwerdt Klaus

Bosch

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Muenzel Horst

Bosch

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Offenberg Michael

Bosch

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Elsner Bernhard

Bosch

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Frey Wilhelm Dr

Bosch

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Kronmueller Silvia

Bosch

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