Fumihito Ohta

Apparatus for analyzing a failure in a semiconductor wafer and method thereof

System for analyzing a failure in a semiconductor wafer by calculating correlation coefficient between collated data of defects per prescribed unit and failures per prescribed unit

Failure analysis system, fatal failure extraction method and recording medium

Failure analysis method, compression threshold deriving method, and recording medium

Semiconductor device inspecting method using conducting AFM

Failure analysis method that allows high-precision failure mode classification

Electronic device having multilayer interconnection structure

Halbleitervorrichtungs-Inspektionsverfahren unter Verwendung eines leitenden RKM The semiconductor device inspecting method using a conductive RKM

The semiconductor device inspection method using a conductive RKM

A method of analyzing a failure in a semiconductor wafer, and therefor