G.J. Tallents

The physics of soft x-ray lasers pumped by electron collisions in laser plasmas

Soft x-ray lasers in the 3.5–50 nm wavelength range have been developed in many laboratories. The shortest wavelengths and highest output irradiances have been produced using plasmas created by optical lasers as the lasing medium. The optical laser is focused into a line on a solid target and the x-ray laser action occurs by amplification along the line with sufficiently high gain that mirrors are not needed. Population inversions are produced by free-electron collisions exciting bound electrons into metastable levels in neon- and nickel-like ions. This topical review presents a summary of the atomic, plasma and propagation physics of x-ray lasers created in this way.

Characterisation of soft X-ray amplification observed in Ne-like germanium

Abstract Soft X-ray amplification has been observed on five 3p → 3s transitions of Ne-like germanium at 19.6, 23,2, 23.6, 24.7 and 28.6 nm using flat, massive targets irradiated in 50 and 150 μm wide line foci up to 3.2 cm long at intensities of 0.3 → 14 × 10 13 W/cm 2 by 1.06 μm laser light in 1 ns and 0.5 ns pulses. Gain lengths up to gl ≈ 12 were measured for the J =2 → 1 transition at 23.6 nm and the temporal behaviour of four of the Ne-like germanium lasing lines has been investigated for the first time. The duration of the gain was 60 → 80% of the fwhm of the laser pulse, with the gain turning off at the trailing half-maximum of the incident laser intensity. Output powers in excess of 10 kW per line have been observed.

Design of a new Nd:YAG Thomson scattering system for MAST

A new infrared Thomson scattering system has been designed for the MAST tokamak. The system will measure at 120 spatial points with approximately 10 mm resolution across the plasma. Eight 30 Hz 1.6 J Nd:YAG lasers will be combined to produce a sampling rate of 240 Hz. The lasers will follow separate parallel beam paths to the MAST vessel. Scattered light will be collected at approximately f/6 over scattering angles ranging from 80 degrees to 120 degrees. The laser energy and lens size, relative to an existing 1.2 J f/12 system, greatly increases the number of scattered photons collected per unit length of laser beam. This is the third generation of this polychromator to be built and a number of modifications have been made to facilitate mass production and to improve performance. Detected scattered signals will be digitized at a rate of 1 GS/s by 8 bit analog to digital converters (ADCs.) Data may be read out from the ADCs between laser pulses to allow for real-time analysis.

X‐ray spectroscopic studies of hot, dense iron plasma formed by subpicosecond high intensity KrF laser irradiation

The time‐integrated x‐ray emission from a hot, dense iron plasma has been recorded. The iron plasma was created when a target with a 1000‐A‐thick iron layer buried beneath 1000 A of plastic was irradiated by a 300 fs pulse of 249 nm laser light at an intensity of approximately 1017 W cm−2. Two models have been used to construct a synthetic x‐ray spectrum. The first employs detailed, spectroscopically accurate atomic data and the second uses a local thermodynamic equilibrium opacity model. The detailed model shows fairly good agreement with experiment whereas the opacity model only shows agreement in the gross features.

Observation of high transient gain in the germanium X-ray laser at 19.6 nm

The transient-excitation pumping scheme, in which a picosecond duration pulse rapidly heats the plasma preformed by a low-intensity nanosecond pulse, was used to pump the Ne-like germanium, J=0–1 transition at 19.6 nm. A small-signal gain coefficient of 30 cm-1 was measured for targets ⩽5 mm long.

Performance Optimization of a High-Repetition-Rate KrF Laser Plasma X-Ray Source for Microlithography

In order to develop a high-intensity laser plasma x-ray source appropriate for industrial application of x-ray lithography, experiments have been carried out using a high-repetition-rate (up to 40 Hz) excimer laser (249 nm, 300 mJ) with a power density of 2 × 1013 W/ cm2 in the laser focus. In this study emphasis is given to remedying specific problems inherent in operating the laser plasma x-ray source at high repetition rates and in its prolonged operation. Two different methods of minimizing the production of target debris are investigated. First, the use of helium as a quenching gas results in a reduction of the amount of atomic debris particles by more than two orders of magnitude with negligible x-ray absorption. Second, a tape target as opposed to a solid target reduces the production of larger debris particles by a further factor of 100. Remaining debris is stopped by an aluminized plastic or beryllium filter used to avoid exposure of the resist by plasma ultraviolet radiation. The x-ray source has been used to image x-ray transmission mask structures down to 0.3 μm onto general purpose x-ray photo-resist. Results have been analyzed with SEM. The x-ray emission spectrum of the repetitive laser plasmas created from an iron target has been recorded and the conversion efficiency of the laser light into x-rays that contribute to exposure of the resist was measured to be 0.3% over 2π sr.

Escape factors for laser-plasmas

Abstract A method of parameterizing escape factors (transmission factors and net radiative brackets) for conditions typical of laser-produced plasmas is introduced. The assumptions of planar geometry, exponentially decreasing emissivity and absorption coefficient with distance with a step rise at a particular point, and spatially constant Doppler broadened line profiles have been made. The effect of velocity gradients in spectrally shifting the absorption and emission line profiles relative to each other is taken into account assuming linear velocity gradients with distance. A parameter R representing the ratio of the spatial scale-length of the absorption coefficient to the Doppler decoupling length is introduced. Fitting formulae for transmission factors and net radiative brackets are given which are valid for all R and all optical depths. In the limit of small R (large Doppler decoupling length), the escape factors asymptotically approach formulae developed originally by, for example, Holstein assuming negligible plasma velocities. For large R (small Doppler decoupling length), the escape factors have been shown to asymptotically approach the Sobolev approximation. The parameterized net radiative bracket has been used in the hydrodynamic and atomic physics code ‘EHYBRID’ for the calculation of the effect of radiation trapping on population densities in laser-produced plasmas. The output of the modified EHYBRID code has then been post processed using the parameterised transmission factors to simulate 123 Ne-like and 399 F-like germanium resonance line intensities emitted in typical X-ray laser experiments. We obtain an agreement between the simulated and experimental spectra.

An injector/amplifier double target configuration for the Ne-like Ge X-ray laser scheme

Abstract The XUV lasing output from one germanium slab target has been efficiently coupled into, and further amplified in, a second plasma produced by irradiation of a similar target from the opposite direction. The operation of such a double target was shown to be strongly dependent on the distance by which the two target surfaces were displaced. The line brightness peaked for a surface displacement of ∼200 μm and it was observed that the pointing direction of one output beam could be controlled by the surface separation in an asymmetric geometry. Gain length products of ∼16 with estimated output powers close to the megawatt level were achieved on both 23.2 and 23.6 nm J =2−1 transitions for an optimised target configuration. Maximum effective coupling efficiencies of the individual outputs from double targets, comprising 2.2. and 1.4 cm length components, approached 100% for beams propagating from the shorter to the longer target.

Gain scaling relationships for Ne-like Ge slab targets

Abstract The gain coefficient of the strongest 3p→3s, J = 2→1 lasing transition at 23.6 nm in the Ne-like Ge collisional excitation scheme has been measured, using the fundamental wavelength from a Nd: glass laser (1.06 μm), for a range of incident intensities on massive stripe targets up to 2.2 cm in length. From a threshold incident laser intensity of ∼ 6 x 10 12 W/cm 2 , the gain coefficient rises to ∼ 4.5 cm -1 for an irradiation intensity of ∼ 2.5 x 10 13 W/cm 2 , tending towards still higher gain coefficients at higher incident intensities. For targets of maximum length, a gain-length product gL ≈ 10 was reached with a resultant output power at 23.6 nm estimated to be at the ∼ kW level. The beam divergence decreased with length to a minimum of ∼ 7 mrad but no significant trend in beam pointing with plasma length was observed. From the trend in the gain coefficient, it appears that for a fixed energy laser irradiating a ∼ 100 μm wide slab targets, an incident incident of I i ∼ 1.2 x 10 13 W/cm 2 represents an optimum working level, assuming that plasma length is not limited by refractive effects. In addition to the usual valence electron excited 3p→3s transitions, the gain coefficient for the core excited 1s 2 2s2p 6 3d→1s 2 2s2p 6 3p transition at 19.9 nm has been measured to be ∼ 1.5 cm -1 for an incident irradiance of ∼2.5 x 10 13 W/cm 2 .

Measurements of direct drive laser imprint in thin foils by radiography using an x-ray laser backlighter

In direct drive inertial confinement fusion, the residual speckle pattern remaining after beam smoothing plays an important role in the seeding of instabilities at the ablation front. We have used an x-ray laser as an XUV backlighter to characterize the imprinted modulation in thin foils for smoothing by random phase plate and spectral dispersion at both 0.35 pm and 0.53 pm irradiation, and induced spatial incoherence at 0.53 pm irradiation. We also demonstrate measurements of the modulation due to a single mode optical imprint generated by a narrow slit interference pattern, and modification of the imprint with a superposed smooth irradiation to study time dependence of the imprinting process. 8 refs., 10 figs.