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Gail D. Shelton

LSI Corporation

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Publication

Featured researches published by Gail D. Shelton.

Archive | 2000

Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material

Brynne K. Chisholm; Gayle W. Miller; Gail D. Shelton

Archive | 2000

Endpoint detection method and apparatus which utilize a chelating agent to detect a polishing endpoint

Gail D. Shelton; Gayle W. Miller

Archive | 1998

Method of detecting a polishing endpoint layer of a semiconductor wafer which includes a non-reactive reporting specie

Gayle W. Miller; Gail D. Shelton; Brynne K. Chisholm

Archive | 1998

Dual gate oxide process for deep submicron ICS

Gail D. Shelton; Gayle W. Miller

Archive | 1998

Method for composing a thermally conductive thin film having a low dielectric property

Gail D. Shelton; Gayle W. Miller

Archive | 1999

Method and arrangement for fabricating a semiconductor device

Gayle W. Miller; Gail D. Shelton

Archive | 2000

Method for enhancing anti-reflective coatings used in photolithography of electronic devices

Kunal N. Taravade; Gayle W. Miller; Gail D. Shelton

Archive | 1998

Copper contamination control of in-line probe instruments

Gail D. Shelton; Gayle W. Miller

Archive | 1998

High reliability bearing structure

Gayle W. Miller; Gail D. Shelton

Archive | 1998

Method for composing a dielectric layer within an interconnect structure of a multilayer semiconductor device

Gayle W. Miller; Gail D. Shelton

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Gayle W. Miller

LSI Corporation

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Brynne K. Chisholm

LSI Corporation

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Kunal N. Taravade

LSI Corporation

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