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Garry K. Kwong

Applied Materials

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Publication

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Archive | 2012

Apparatus And Process For Atomic Layer Deposition

Joseph Yudovsky; Garry K. Kwong; Mei Chang; Anh N. Nguyen; David Thompson

Archive | 2011

Multi-Component Film Deposition

Joseph Yudovsky; Mei Chang; Steven D. Marcus; Garry K. Kwong

Archive | 2014

Elongated capacitively coupled plasma source for high temperature low pressure environments

John C. Forster; Joseph Yudovsky; Garry K. Kwong; Tai T. Ngo; Kevin Griffin; Kenneth S. Collins; Ren Liu

Archive | 2014

Apparatus and process containment for spatially separated atomic layer deposition

Garry K. Kwong; Joseph Yudovsky; Steven D. Marcus

Archive | 2012

Self-contained heating element

Garry K. Kwong; Joseph Yudovsky; Steven D. Marcus

Archive | 2015

Top lamp module for carousel deposition chamber

Joseph Yudovsky; Robert T. Trujillo; Kevin Griffin; Garry K. Kwong; Kallol Bera; Li-Qun Xia; Mandyam Sriram

Archive | 2012

Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use

Joseph Yudovsky; Garry K. Kwong; Dieter Haas; Steven D. Marcus; Timothy W. Weidman

Archive | 2014

Lamp heater for atomic layer deposition

Umesh Kelkar; Kallol Bera; Karthik Ramanathan; Garry K. Kwong; Joseph Yudovsky

Archive | 2017

Heating Source For Spatial Atomic Layer Deposition

Garry K. Kwong; Joseph Yudovsky; Kevin Griffin; Kallol Bera; Omer Ozgun

Archive | 2017

High Temperature Heater For Processing Chamber

Alexander S. Polyak; Joseph Yudovsky; Garry K. Kwong

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Collaboration

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Joseph Yudovsky

Applied Materials

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Kevin Griffin

Applied Materials

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Steven D. Marcus

Applied Materials

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Kallol Bera

Applied Materials

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Mei Chang

Applied Materials

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Alexander S. Polyak

Applied Materials

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Anh N. Nguyen

Applied Materials

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David Thompson

Applied Materials

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Dieter Haas

Applied Materials

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John C. Forster

Applied Materials

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