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Steven D. Marcus

Applied Materials

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Publication

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Archive | 2013

Method And Apparatus For Low Temperature ALD Deposition

Maitreyee Mahajani; Steven D. Marcus; Li-Qun Xia; Mihaela Balseanu; Victor Nguyen; Ning Li; Jingjing Liu; Sukti Chatterjee; Timothy W. Weidman

Archive | 2011

Multi-Component Film Deposition

Joseph Yudovsky; Mei Chang; Steven D. Marcus; Garry K. Kwong

Archive | 2012

Reactant Delivery System For ALD/CVD Processes

Kenric Choi; Joseph Yudovsky; Steven D. Marcus; Ernesto Ulloa

Archive | 2015

Self-Aligned Double Patterning With Spatial Atomic Layer Deposition

Ning Li; Victor Nguyen; Mihaela Balseanu; Li-Qun Xia; Keiichi Tanaka; Steven D. Marcus

Archive | 2015

SEAMLESS GAP-FILL WITH SPATIAL ATOMIC LAYER DEPOSITION

Ning Li; Victor Nguyen; Mihaela Balseanu; Li-Qun Xia; Steven D. Marcus; Haichun Yang; Keiichi Tanaka

Archive | 2016

Gas Separation Control in Spatial Atomic Layer Deposition

Ning Li; Steven D. Marcus; Tai T. Ngo; Kevin Griffin

Archive | 2014

Apparatus and process containment for spatially separated atomic layer deposition

Garry K. Kwong; Joseph Yudovsky; Steven D. Marcus

Archive | 2012

Self-contained heating element

Garry K. Kwong; Joseph Yudovsky; Steven D. Marcus

Archive | 2012

Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use

Joseph Yudovsky; Garry K. Kwong; Dieter Haas; Steven D. Marcus; Timothy W. Weidman

Archive | 2015

IN SITU DOPING OF CARBON AND OXIDE TO ATOMIC LAYER DEPOSITION SILICON NITRIDE FILM

Victor Nguyen; Mihaela Balseanu; Li Ning; Steven D. Marcus; Mark Saly; David Thompson; Xia Li-Qun

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Joseph Yudovsky

Applied Materials

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Mihaela Balseanu

Applied Materials

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Ning Li

Applied Materials

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Victor Nguyen

Applied Materials

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Garry K. Kwong

Applied Materials

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Li-Qun Xia

Applied Materials

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David Thompson

Applied Materials

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Keiichi Tanaka

Applied Materials

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Mark Saly

Applied Materials

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Timothy W. Weidman

Applied Materials

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