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Gary R. Janik

KLA-Tencor

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Publication

Featured researches published by Gary R. Janik.

Archive | 2003

Optical system for measuring samples using short wavelength radiation

Mehrdad Nikoonahad; Shing Lee; Hidong Kwak; Sergio Edelstein; Guoheng Zhao; Gary R. Janik

Archive | 2004

Systems and methods for measurement of a specimen with vacuum ultraviolet light

Gary R. Janik; Shing Lee

Archive | 2004

Systems and methods for measurement or analysis of a specimen using separated spectral peaks in light

Gary R. Janik

Archive | 2001

Method and apparatus for improved x-ray reflection measurement

Gary R. Janik; Jeffrey A. Moore

Archive | 2003

Optical film topography and thickness measurement

Gary R. Janik; Hidong Kwak; Ying Gao; Johannes D. De Veer

Archive | 2004

Multi-technique thin film analysis tool

Gary R. Janik; Jeffrey A. Moore

Archive | 2002

Laser-based cleaning device for film analysis tool

Gary R. Janik; Patrick M. Maxton

Archive | 2002

X-ray metrology using a transmissive x-ray optical element

Gary R. Janik

Archive | 2003

Time-resolved measurement technique using radiation pulses

Hidong Kwak; Gary R. Janik; Mehrdad Nikoonahad

Archive | 2002

Methods and apparatus for characterizing thin films

Gary R. Janik; Roger Kroeze; Murali Narsimhan

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Collaboration

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Hidong Kwak

KLA-Tencor

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Jeffrey A. Moore

KLA-Tencor

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Shing Lee

KLA-Tencor

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Qiang Zhao

KLA-Tencor

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Sungchul Yoo

KLA-Tencor

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Torsten R. Kaack

KLA-Tencor

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Zhengquan Tan

KLA-Tencor

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Dan G. Georgesco

KLA-Tencor

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Dieter Wilk

KLA-Tencor

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Eric Bouche

KLA-Tencor

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