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Hidong Kwak

KLA-Tencor

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Publication

Featured researches published by Hidong Kwak.

Archive | 2003

Optical system for measuring samples using short wavelength radiation

Mehrdad Nikoonahad; Shing Lee; Hidong Kwak; Sergio Edelstein; Guoheng Zhao; Gary R. Janik

Archive | 2003

Optical film topography and thickness measurement

Gary R. Janik; Hidong Kwak; Ying Gao; Johannes D. De Veer

Archive | 2003

Time-resolved measurement technique using radiation pulses

Hidong Kwak; Gary R. Janik; Mehrdad Nikoonahad

Archive | 2008

Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system

Hidong Kwak; Shankar Krishnan; Shing Lee; Haixing Zou

Archive | 2008

Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry

Hidong Kwak; Shankar Krishnan

Archive | 2014

Metrology system calibration refinement

Hidong Kwak; John Lesoine; Malik Sadiq; Lanhua Wei; Shankar Krishnan; Leonid Poslavsky; Mikhail Sushchik

Archive | 2004

Methods and systems for preparing a sample for thin film analysis

James T. McWhirter; Liang-Guo Wang; Hidong Kwak; Haixing Zou; Dan G. Georgesco; Bernard Lautee; Jennming James Chen; Gary R. Janik; Patrick M. Maxton

Archive | 2012

Spectral Matching Based Calibration

Hidong Kwak; Zhiming Jiang; Ward Dixon; Kenneth Edward James; Leonid Poslavsky; Torsten R. Kaack

Archive | 2012

MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY

Hidong Kwak; Ward Dixon; Leonid Poslavsky; Torsten R. Kaack

Archive | 2012

Atmospheric Molecular Contamination Control with Local Purging

Hidong Kwak; Ward Dixon; Torsten R. Kaack; Ning-Yi Neil Wang; Jagjit Sandhu

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Gary R. Janik

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Leonid Poslavsky

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Shankar Krishnan

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Torsten R. Kaack

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Ward Dixon

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Damon F. Kvamme

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Daniel R. Hennigan

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Esen Salcin

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Fuming Wang

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Haixing Zou

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