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Gerd Fürter

Carl Zeiss AG

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Publication

Featured researches published by Gerd Fürter.

Archive | 2000

Catadioptric objective comprising two intermediate images

David Shafer; Alois Herkommer; Karl-Heinz Schuster; Gerd Fürter; Rudolf von Bünau; Wilhelm Ulrich

Archive | 2002

Catadioptric reduction objective

Gerd Fürter; Wilhelm Ulrich

Archive | 1998

Maximum aperture catadioptric reduction objective for microlithography

Gerd Fürter

Archive | 1997

High-resolution high-apertured objective

Gerd Fürter

Archive | 1996

REMA objective for microlithographic projection exposure systems

Gerd Fürter; Johannes Wangler; Udo Dinger; Gerhard Ittner

Archive | 2002

Projection exposure apparatus and exposure method

Gerd Fürter

Archive | 1995

Very wide aperture catadioptric reducing object lens for microlithography

Gerd Fürter

Archive | 2001

Projection aligner for microlithography

Gerd Fürter; Uwe Goedecke; Henriette Müller; Christian Wagner; ゲデッケ ウーヴェ; ヴァーグナー クリスティアン; フュルター ゲルト; ミュラー ヘンリエッテ

Archive | 1996

REMA objective for microlithographic projection illumination

Gerd Fürter; Johannes Wangler; Udo Dinger; Gerhard Ittner

Archive | 2001

Projection exposure system with reflective reticle

Gerd Fürter; Christian Wagner; Uwe Gödecke; Henriette Müller

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Collaboration

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Gerhard Ittner

Carl Zeiss AG

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Johannes Wangler

Carl Zeiss AG

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Udo Dinger

Carl Zeiss AG

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Wilhelm Ulrich

Carl Zeiss AG

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Christian Wagner

Carl Zeiss AG

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Henriette Müller

Carl Zeiss AG

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Alexandra Pazidis

Carl Zeiss AG

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Alois Herkommer

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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David Shafer

Carl Zeiss AG

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