Giancarlo Corradini

Millinewton force sensor based on low temperature co-fired ceramic (LTCC) technology

Fabrication of a millinewton force sensor, which is based on LTCC technology as an alternative to the widely used alumina (Al2O3) is described. The new sensor, integrated with piezoresistor thick-film, has shown an increase in the sensitivity by two times compared to the alumina-based version in the first attempt. This is ascribed to the smaller elastic modulus and finer substrate thickness attainable by LTCC. Moreover design flexibility is also an important factor, which contributes to the increased sensitivity of the sensor. It is strongly expected that the device performance can further be improved, by modifying the co-fired LTCC components such as LTCC tape and the thick-film terminations.

Structuration and Fabrication of Sensors Based on LTCC (Low Temperature Co-Fired Ceramic) Technology

The purpose of this paper is to demonstrate sensors and structures fabricated using the LTCC technology, which has been addressed and employed increasingly as a smart packaging approach for several applications. The focus will be on inclination and cantilever force sensors and micro-fluidic structures. Motivation for selection of LTCC for these applications in addition to fabrication and structuring of the devices will be explained in details. TGA (thermo-gravimetric analysis), dilatometer analysis, SEM (scanning electron microscopy), electronic equipment for measuring sensor performance will be extensively used for explanation of the results. It will also be shown that, compared to classical thick-film technology on alumina, LTCC allows a considerable increase in sensitivity, and is therefore better suited for the sensing of minute forces and pressures.