Giback Park

Electrode Properties of Thin Film Battery with LiCoO 2 Cathode Deposited by R.F. Magnetron Sputtering at Various Ar Partial Pressures

We investigated the electrochemical properties and microstructure on the various argon deposition pressure and the low annealing temperature of cathodes, which deposited by R.F. magnetron sputtering. The microsuucture and composition of Lico02 thin film was changed as a function of . The capacity and electrochemical properties were improved with Ph of thin films. The cycling reversibility and stability of thin film batteries were measured by cyclic voltammetry and the constant current charge-discharge. The physical properties of cathode films were analyzed by ICP-AES, XRD, SEM and AFM for composition, crystallization and surface morphology.

0.6 mAh All-Solid-State Thin Fim Battery Fabricated on Alumina Substrate

Lithium cobalt oxide thin film cathode, having thickness of with area of , was deposited on platinum patterned alumina substrate by radio frequency magnetron sputtering. Li/Co molar ratio, which is an important factor for battery performance, was measured as a function of argon working pressure and applied R.F. power. Constant current charge and discharge performances were characterized with high rate discharge and cycling behavior. Using AC impedance analysis, internal resistance of the thin film battery was measured and simulated by proposed equivalent circuit model.